Development of a New MEMS Resonant Differential Pressure Sensor with High Accuracy and High Stability

•A bulk-micromachined MEMS resonant differential pressures sensor is developed.•The sensor output was theoretically modeled to instruct the design of the sensitive element.•A novel silicon-based stress isolation structure was designed and fabricated to improve the stability of sensor.•The process based on Au-Au bonding and Au/Sn welding were employed to package the sensor.•The developed sensor demonstrated high accuracy and stability.