Role of P(O <sub>2</sub>) in Annealing of the SiO <sub>2</sub>/SiC Stack Formed by Si Deposition plus Oxidation

Extended Abstracts of the 2023 International Conference on Solid State Devices and Materials（2023）

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Role of P(O &lt;sub&gt;2&lt;/sub&gt;) in Annealing of the SiO &lt;sub&gt;2&lt;/sub&gt;/SiC Stack Formed by Si Deposition plus Oxidation