Mass Transfer System of a Large Number of Small Objects Based on Conjunction of Triboelectric Nanogenerators and Photo-Responsive Interface

Mass transfer technology for large quantities of tiny substances, such as electronic chips and drug particles, plays a crucial role in many industries. This study proposes a transferring system for large quantities of small objects based on the synergism of triboelectric nanogenerators (TENGs) and photo-responsive dielectric materials. TENG device can provide an output voltage of over 8 kV within a rotation time of 40 ms and the titanium oxide phthalocyanine (TiOPc) photoconductive films are fabricated as the photo-responsive interface, in order to match the output impedance of TENG. The transfer system enables a maximum adsorption load of 98 mg mm-2, which is enough for handling all common electronics chips/wafers. Under the stimulation of laser light, the conductivity of the TiOPc interface can be increased by two orders of magnitude within 1 ms, which leads to the vanish of the surface potential on the laser spot and the release of patterned or pointed object. This photo-responsive strategy can achieve both large quantity transfer of tiny objects and highly selective release of the element at designed position. This collaborative mechanism of electrostatic force and photoconductivity provides a different approach for realizing efficient and precise Mass transfer system of semiconductor and chip industry. A positioning transfer system with TENG as the adhesion force and photo-responsive materials as the transport interface is proposed. The adhesion force provided by the TENG causes components to be adsorbed by the photo-responsive interface, which can be released as a whole or patterned by switching the external circuitry or by scanning the light source. image