A novel approach to reduce the oxygen content in monocrystalline silicon by Czochralski method

Jiancheng Li, Junlei Wang,Lijun Liu, Yong Wen, Changzhen Wang

JOURNAL OF CRYSTAL GROWTH(2024)

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摘要
High-efficiency solar cells require monocrystalline silicon wafers with lower oxygen content. This paper presents a design for an oxygen-lowering ring to decrease the oxygen content of 300 mm monocrystalline silicon, and experimentally verifies its effectiveness in reducing oxygen. Numerical simulations show that the use of the oxygen-lowering ring leads to a decrease of the crucible temperature at the bottom of the crucible and an increase of the crucible temperature at the top side of the crucible. In addition, a series of global simulations of oxygen transport were conducted to analyze how variations in the temperature distribution of the crucible wall affect the oxygen content at the m -c interface. The simulations revealed that the region of the crucible wall where dissolved oxygen is transported to the m -c interface is contained within the region of the crucible wall where the temperature decreases, implying that the addition of the oxygen-lowering ring reduces the source of oxygen transported to the m -c interface. Moreover, the addition of the oxygen-lowering ring reduces the turbulent viscosity in the melt, which weakens the ability to transport oxygen to the m -c interface.
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关键词
A1.Computer simulation,A1. Oxygen impurities,A1. Heat transfer,A1. Mass Transfer,A2. Czochralski method,A2. PV silicon
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