Robust reverse bias safe operating area and improved electrical performance in 3300 V non-proportionally scaled insulated gate bipolar transistors

Robustness under high-temperature clamped inductive turn-off has been compared systematically among 3300 V scaled insulated gate bipolar transistors (IGBTs) with scaling factor k from 1 to 10 by technology computer-aided design simulations. Degradation of the reverse bias safe operating area (RBSOA) has been observed in proportionally scaled IGBTs, especially at a high turn-off current density. A non-proportional scaling method has been proven to be able to restore the robustness degradation with RBSOA close to the original k = 1 case. Moreover, the method for adjusting R pf (P-floating connecting resistor) adds more flexibility to device design and also improves the overall electrical performance of non-proportionally scaled IGBTs. The adjustment of R pf has been found to have a minimal effect on the RBSOA.