Optimizing the Performance of a Pd Film-Based Room-Temperature H2 Sensor by Eliminating the Clamping Effect with Cr Nanoparticles

ACS APPLIED NANO MATERIALS(2024)

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摘要
In this study, Chromium nanoparticles (Cr NPs) were introduced as adhesion sites between Palladium (Pd) films and SiO2 substrates to enhance the sensing performance of room-temperature hydrogen (H-2) sensors for lithium-ion batteries. The morphology of the Cr NPs was characterized using atomic force microscopy and scanning electron microscopy. The sensitivity, selectivity, and long-term stability were evaluated in a thermostatic bath using the four-wire method in a wide temperature range. The results showed that incorporating with dispersive Cr NPs under the Pd film as adhesion sites which significantly enhances the sensing performance of the sensor to address the issues of deformation in pure Pd films and the clamping effect in continuous Cr films as adhesion. Additionally, a circuit was developed for accurately collecting the signals of the H-2 sensor.
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关键词
H(2)sensor,palladium,chromium nanoparticles,MEMS process,clamping effect
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