SF6 mixed in N2 gas sensing responses from CMOS-compatible AlN and ScAlN pyroelectric detectorsDoris K. T. Ng,Weiguo Chen,Linfang Xu, Harmony J. E. Lau,Landobasa Tobing,Chong Pei Ho, Wing Wai Chung,Norhanani Jaafar, Hanfeng Fu,Qingxin ZhangMOEMS and Miniaturized Systems XXIII(2024)引用 0|浏览1暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要