A Cross-Band Piezoelectric Screw Motor Operating in Multimode
IEEE transactions on industrial electronics(2024)
摘要
To simultaneously meet the requirements of precision instruments for both high speed and high resolution, this study proposes a cross-band piezoelectric screw motor capable of operating simultaneously in the static, quasi-static, and resonant states. The motor is capable of exhibiting different motion characteristics under different working modes. In the static state, high-precision positioning of the motor is achieved by applying direct current to piezo-stacks. In the quasi-static state, low-speed and high-resolution movements of the motor are achieved by providing piezo-stacks with a sawtooth wave signal. In the resonant state, high-speed motion of the motor is realized by giving piezo-stacks sinusoidal signals to excite the stator to resonate. Theoretical and finite element models are established for analysis and simulation. A prototype is manufactured, assembled and tested. Experiment results show that in the static state, the prototype achieves a resolution of 0.5 nm. In the quasi-static state, with a sawtooth wave excitation of 1000 Hz and 400 Vpp, the prototype achieves a velocity of 19.58 mu m/s, a load of 650 g and a resolution of 0.93 nm. In the resonant state, with sinusoidal signals excitation of 10.4 kHz and 150 Vpp, the prototype reaches a velocity of 8.5 mm/s and a load of 3600 g.
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关键词
Motors,Stators,Voltage,Fasteners,Mathematical models,Trajectory,Signal resolution,Cross-band piezoelectric motor,piezoelectric screw motor,quasi-static,resonant
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