High-Frequency Grating-Based Microelectromechanical Systems Actuator Inês Pires, Inês S. Garcia, João Vieira,Zeev Zalevsky, Carlos Calaza, Filipe S. Alves, Rosana A. DiasEurosensors 2023(2024)引用 0|浏览5暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要