Foundry manufacturing of octave-spanning microcombs
arxiv(2024)
摘要
Soliton microcombs provide a chip-based, octave-spanning source for
self-referencing and optical metrology. We explore use of a silicon-nitride
integrated photonics foundry to manufacture octave-spanning microcombs. By
group-velocity dispersion engineering with the waveguide cross-section, we
shape the soliton spectrum for dispersive-wave spectral enhancements at the
frequencies for f-2f self-referencing. With the optimized waveguide geometry,
we control the carrier-envelope offset frequency by adjusting the resonator
radius. Moreover, we demonstrate the other considerations for octave
microcombs, including models for soliton spectrum design, ultra-broadband
resonator external coupling, low-loss edge couplers, and the nonlinear
self-interactions of few-cycle solitons. This design process permits highly
repeatable creation of soliton microcombs optimized for pump operation less
than 100 mW, an electronically detectable offset frequency, and high comb mode
power for f-2f detection. However, these design aspects must also be made
compatible with the foundry fabrication tolerance of octave microcomb devices.
Our experiments highlight the potential to manufacture a single-chip solution
for an octave-spanning microcomb, which is the central component of a compact
microsystem for optical metrology.
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