Phase-shifted counterpropagating atmospheric pressure plasma jets: Characterization and interaction with materials

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B(2024)

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摘要
This study investigates the interaction between two counterpropagating atmospheric pressure plasma jets when their respective streamer ignition times are varied by introducing a phase difference between the AC waveforms used to generate them. When the plasma jets are driven in phase, the streamers form at approximately the same time, resulting in a dark region between the two jets. As the phase difference increases, this dark region shifts toward one of the electrodes. With a sufficiently large phase difference, this region vanishes, giving rise to a uniform plasma channel spanning the distance between the electrodes. High-speed imaging reveals that the interaction between the streamers within the channel reduces the streamer propagation length at intermediate phase differences. At large phase differences, the propagation distance of each streamer is enhanced due to the absence of the opposing streamer. Increasing the phase from 0 degrees to 160 degrees reduced the power consumption of the two jets by about 10%, while there was no significant change in the electron density or the N2 vibrational/rotational temperature. Finally, we show how phase-shifting enhances the interaction with three-dimensional objects located between the opposing jets, enabling the treatment of 3D substrates.
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