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Design and Fabrication of a Fast-Response and Low-Energy Input Micro-Igniter

Sensors and actuators A, Physical(2024)

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摘要
In this study, we innovatively combine direct ink writing (DIW) and physical vapor deposition (PVD) to fabricate a novel micro igniter with fast-response and low-energy input characteristics. The igniter comprises a 5×5mm² metal film bridge with gold contact pads. The metallic resistance is fabricated using a series of photolithography, metal deposition, and lift-off processes. After evaluating titanium and chromium as the resistive filament, titanium was selected due to its superior reactivity when in contact with CuO leading to reduced ignition energy. Onto the resistive titanium layer, either thermite multilayer films and/or energetic inks are deposited to achieve a head-to-head comparison of ignition characteristics. We show that igniters powered by (CuO/Ti)5 bilayers and Al/CuO/PVDF as energetic ink demonstrate the equivalent ignition performance as reactive (CuO/Ti)5 multilayered igniter. The ignition delay and ignition energy are below 1 ms and 2 mJ, respectively, while the flash intensity is approximately one decade higher than what is typically achieved with conventional micro-igniters. Furthermore, its ignition behaviour can be readily adjusted by altering the constituents of the fuel/oxidizer or adjusting the ratio of multilayer/inks, thereby allowing for easy adaptation of the micro-igniter to meet the diverse requirements of various applications.
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关键词
MEMS,Igniters,Thin-films,Direct ink writing,Energetic materials,Physical vapor deposition
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