Enhanced performance of Ku-band GaN MMIC PA through embedded microfluidic cooling

Wen Hong,Li Zhang, Chao Zhang, Fang Zhang,Shao-Zhong Yue, Peng-Bo Du,Xue-Feng Zheng,Xiao-Hua Ma,Yue Hao

Applied Physics Letters(2024)

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摘要
The impact of embedded microfluidic cooling on the performance of Ku-band gallium nitride (GaN) microwave monolithic integrated circuit (MMIC) power amplifiers (PAs) has been studied in this work. The research demonstrates that embedded cooling can substantially lower junction temperatures, mitigate the self-heating effect, and thereby improve the electrical performance of GaN MMIC PAs. Using merely 10.4 mW of pumping power (Ppump), the technology reduces the maximum junction temperature (Tj,max) from 216.7 to 147.8 °C. Furthermore, the system enhances the saturation current by 13.8%, increases output power (Pout) and gain (Gain) by 1.8 dB, elevates the power added efficiency (PAE) by 5.9%, and improves the heat flux of last gate (Qgate) to 37.3 kW/mm2 and the heat flux of MMIC (QMMIC) over 2.6 W/mm2, while reducing the thermal resistance (Rj-c) from 2.13 to 1.26 °C/W. Additionally, there is a notable improvement of the small signal gain (S21) by 2.5 dB. Therefore, the achievements in this work indicate that embedded cooling offers a powerful technique to suppress the thermal effects on GaN MMIC PAs, consequently improving their electrical performance.
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