Triboelectric Pressure Sensor with Surface Charge Density Calibration

2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)(2023)

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摘要
This paper reports a self-powered pressure sensor that operates on the triboelectric principle and features a distinctive compensation mechanism. This compensation system accounts for fluctuations in surface charge density. The two signals are generated from the sensor, an open-circuit voltage and a calibration voltage. By analyzing both signals concurrently, the current surface charge density can be determined. The calibration voltage is generated through an electrical switch that closes only at specific deformations of the sensor. The compensation system was effective in a variety of humidity conditions.
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关键词
Triboelectric sensors,self-powered sensors,compensation algorithm
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