A Resonant High-Pressure Sensor with an H-Cavity

This paper introduces a resonant high-pressure sensor with an H-cavity. In comparison to previous studies, the sensor adopted the H-cavity design to establish the areas of compressive and tensile stresses, increasing the process tolerance and producing the opposite pressure sensitivities. Experimental results showed that the opposite high-pressure sensitivities were 0.163 kHz/MPa and -0.072 kHz/MPa separately and the differential temperature sensitivity was -1 Hz/°C. Benefiting from the opposite pressure sensitivities and the low temperature sensitivity, a high accuracy of 0.01% FS was achieved by the sensor in the pressure and wide temperature ranges of 0.11 to 7 MPa and -40 to 80°C.