A Novel Water-Immersible Metal Micro Scanning Mirror Based on Zigzag Beam Structure

This paper reports a novel water-immersible micro scanning mirror, characterized by the metal manufacturing, easy assembly and low cost. Compared with flexible polymers, metal material is easier to process and more likely to maintain long-term stability of physical properties. By adopting the zigzag beam structure and electromagnetic driving scheme, the metal micro scanning mirror can realize an optical angle greater than 30° in the air and greater than 18° underwater at low resonant frequency. Besides, a combined action mechanism of nonlinear damping and nonlinear magnetic driving force is proposed to explain the scanning characteristics of the scanning mirror in the air and underwater.