Development and optimization of large-scale integration of 2D material in memristors
arxiv(2024)
摘要
Two-dimensional (2D) materials like transition metal dichalcogenides (TMD)
have proved to be serious candidates to replace silicon in several technologies
with enhanced performances. In this respect, the two remaining challenges are
the wafer scale growth of TMDs and their integration into operational devices
using clean room compatible processes. In this work, two different
CMOS-compatible protocols are developed for the fabrication of MoS_2-based
memristors, and the resulting performances are compared. The quality of MoS_2
at each stage of the process is characterized by Raman spectroscopy and x-ray
photoemission spectroscopy. In the first protocol, the structure of MoS_2 is
preserved during transfer and patterning processes. However, a polymer layer
with a minimum thickness of 3 nm remains at the surface of MoS_2 limiting the
electrical switching performances. In the second protocol, the contamination
layer is completely removed resulting in improved electrical switching
performances and reproducibility. Based on physico-chemical and electrical
results, the switching mechanism is discussed in terms of conduction through
grain boundaries.
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