Research on geometric errors identification influenced by laser interferometer installation parameters based on sensitivity analysis

For the redundancy in definition of position independent geometric errors(PIGEs) and position dependent geometric errors(PDGEs), it is difficult to identify all geometric errors of rotational axis simultaneously. A novel identification method using boundaryless constraint optimization method(BCOM) is established to improve PIGEs and PDGEs identification accuracy of rotary axis. For PIGEs, the two different dimension errors are identified separately based on least square method through appropriate measurement direction by double ball bar(DBB), and thus decrease condition number of identification matrix. For PDGEs, the B-spline curve is applied to fit the geometric errors and the objective function has been established. Several measurement paths are conducted and geometric errors are figured out by iterations of objective function. Furthermore, setup errors of DBB are investigated and discussed based on the sensitivity analysis. Finally, Simulations and experiments are conducted and their results demonstrate the effectiveness of the proposed method.