Advancing Semiconductor Manufacturing through DNA- Templated Lithography and Molecular-Scale Patterning of 2D Materials

This paper explores the potential of using DNA nanostructure to pattern molybdenum disulfide (MoS 2 ) for potential applications in nanoelectronics. We developed a gas phase synthesis of MoS 2 with minimal out-of-plane growth and low defect density. We used density functional theory (DFT) calculation to examine the bandgap modulation of MoS 2 due to counterion diffusion from DNA, highlighting the electron transfer mechanism during lithium intercalation. Lastly, we demonstrate deposition of DNA triangles and nanotubes on various MoS 2 surfaces. Contrary to previous results, we found that these DNA nanostructures maintained their structural stability. These findings collectively contribute valuable insights into using DNA nanotechnology to advance 2D electronics.