International Solid-State Sensors, Actuators and Microsystems Conference : [proceedings]

In this work, wide-band acoustic delay lines (ADLs) based on dual single-phase unidirectional transducers (SPUDTs) are simulated and implemented on 1 mu m scandium doped aluminum nitride (Al0.7Sc0.3N) thin film. The band width (BW) of the ADLs was broadened by connecting two SPUDTs with adjacent passband in parallel to a single radio frequency (RF) port. The ADL based on the 7-cell dual SPUDT structure demonstrated a measured fractional band width (FBW) of 13.1%, representing an increase of 65.8% compared to the ADL based on single SPUDT, while maintaining nearly the same insertion loss (IL). Furthermore, a theoretical model of the phasor method was developed to explain the central passband fluctuation observed in the ADL with a 5-cell dual SPUDT configuration. This work not only broadened the ADL passband without increasing the IL but also holds significant importance for extending the operation BW of multi-physics coupled devices based on ADLs.

Highly flexible and low-damage electronic devices can be realized using nanosheets, which are 101 to 103-nm thick polymer films that exhibit excellent flexibility and self-adhesiveness. However, flexible electronic devices using nanosheets suffer from breaking around the connector electrodes under tensile load. This paper presents electrode shapes with multiple holes to increase the circumferences and reduce the stress. By experimentally optimizing the electrode shapes, the stretch tolerance was improved by 7.5 times (4.0 N). Furthermore, the flexibility and robustness of the nanosheet devices were demonstrated by attaching them to the human skin and plant leaves without adhesives. Our flexible, low-damage, and robust nanosheet devices can expand the applications of electronic devices, such as long-term continuous healthcare monitoring, photodynamic cancer therapy, and observation of transpiration in plants.

In this paper, an investigation concerning a potential photoelectric effect on a MEMS resonator is conducted. In brief, the device operates in different cryogenic temperatures ranging from 210 K to 170 K. By measuring the first two flexure mode frequencies of the resonator and using a mutual calibration method, two conclusions can be drawn: (i) the effect of light on the resonator is not a simple photothermal effect and (ii) the effect of photothermal and photoelectric becomes distinguishable with the temperature decrease. It is the first time to rigorously prove the low-temperature photoelectric effect using two modes of a single MEMS resonator at cryogenic temperature.

This work presents a S-0 mode Lamb wave resonator (LWR) on the lithium niobate (LiNbO3) platform. Niobium nitride (NbN) was utilized as the superconducting electrode material to reduce the electrode loss and increase the quality factor (Q) of the resonator at cryogenic temperature. During the fabrication, a novel process was developed to avoid the corrosion of NbN by XeF2 upon release. In the cryogenic temperature test, we observed a significant increase in the Q value of the device below 10 K. For further analysis, a unique modified Butterworth-Van Dyke (MBVD) model was used to fit the test results at different temperatures. The electrode loss, which is the R-s value in the model, is extremely close to 0 at superconducting temperature. This achievement is remarkable for future applications in emerging hybrid quantum networks that integrate phonons and qubits.

Droplet-based assays have become integral to modern biological research, yet traditional droplet generation techniques often depend on complex and costly microfluidic setups. Here, we introduce a handheld droplet generator leveraging a modified electric toothbrush mechanism, providing a cost-effective, user-friendly, and highly adaptable alternative. This device eliminates the need for intricate infrastructure, reduces reagent waste, and prevents cross-contamination. Droplets of varying sizes and densities are precisely controlled through manual amplitude adjustments, facilitating versatility across multiple scientific applications. Experimental evaluations demonstrated consistent droplet uniformity and reliable performance in digital assays, including colony counting and digital LAMP reactions.