IEEE/ASME Journal of Microelectromechanical Systems - 期刊 | AMiner

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论文（31）

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1高温応用のためのアンバ金属導体を持つシリコン貫通電極(TSV)【Powered by NICT】

Asiatici Mikhail,J Laakso Miku,C Fischer Andreas,Stemme Goran,Frank Niklaus

2017

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2高精度MEMS圧力センサにおける湿度‐温度‐機械的応力の影響の同定と除去【Powered by NICT】

Sandvand Asmund,Einar Halvorsen,E Aasmundtveit Knut,Jakobsen Henrik

2017

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3溶融シリカへの深い高アスペクト比パターンのプラズマエッチング【Powered by NICT】

Pedersen Michael,Huff Michael

2017

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4ウエハボンディングを用いた可変焦点スキャナ【Powered by NICT】

Nakazawa Kenta,Sasaki Takashi,Furuta Hiromasa,Kamiya Jiro,Kamiya Toshikazu,Kazuhiro Hane

2017

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5古典的Meissnerパラメトリック共振器のMEMS実装:非有界応答の高次窓【Powered by NICT】

Shmulevich Shai,David Elata

2017

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立即登录，查看全部 31 篇论文

高被引作者

作者	引用	发文
L. L. Chu	188	1
Oliver, A.D.	188	1
Yogesh B. Gianchandani	188	1
David P. Adams	135	1
MJ VASILE	135	1
Gilbert Benavides	135	1
Edwin R. Fuller	27	1
Michael S Gaither	27	1
Gates Richard S	27	1
Mikhail Y. Efremov	26	1

高产作者

作者	引用	发文
Navakanta Bhat	0	2
William Scheideler	0	1
H. M. H. Chong	23	1
Didier Leclercq	0	1
Lawrence P. Cook	26	1
Mahesh Nayak	0	1
Liang Hu	26	1
Gianluca (Gian) Piazza	0	1
Chenyang Xue	0	1
Åsmund Sandvand	0	1

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