This paper proposes an anchor design and fabrication method for high-Q Lame-mode resonators. It systematically investigates the various factors influencing anchor energy loss, with a first-time focus on the mechanism through which crystal orientation deviation impacts such loss. It is found that crystal orientation deviation is also a major contributor to energy loss in Lame-mode resonators. By controlling crystal orientation deviation during fabrication, the resulting Lame-mode resonator achieves a Q-factor of 772,600 at an operating frequency of 30 MHz, with an f x Q product of 2.36x10(13), which is among the highest values reported for silicon-based devices.
This paper describes a new 2D chromatography cassette with through-hole electrospray ionization and desorption for high performance MS analysis. The paper chip is produced by high precision IR laser for two-dimensional paper chromatography. The innovative design of the paper chip can boost the effectiveness of 2D chromatography and simultaneously increase the ion intensity. This study systematically studied the ion intensity which affected by 1st and 2nd dimensional chromatography performance under different distance between MS inlet and ESI tip. In addition, this study also discussed the effectiveness of on-chip thermal plate desorption. The results perform the capability of 2D Chromatography Cassette for detecting the bio-sample and the mixed sample. Successfully detecting different species in the Chinese herb medicines and the extracted solution of camphor leaves. The developed slidable lateral flow cassette has shown its potential in the application of complex samples.
This work presents the implementation and characterization of resonant surface acoustic wave (SAW)based acousto-optic modulators in silicon (Si)-loaded 30% scandium aluminum nitride (ScAlN) on sapphire (SoS), advancing an integrated photonics platform for low-V-pi modulation. Exploiting the index-of-refraction contrast between silicon and scandium aluminum nitride with the low-index sapphire yields robust mode guidance within the heterostructure, ensuring efficient optical mode confinement. Together with the high electromechanical coupling (kt(2)) of SoS, SAW resonators generate high strain to modulate the effective refractive index, enabling resonant acousto-optic modulation. Fabricated modulators in this platform achieve a measured V-pi center dot L of 3.60 V center dot cm, highlighting its potential for integrable, high-performance optomechanical devices.
This work presents the first implementation of ferroelectric activation as a post-fabrication optimization methodology for Sc0.3Al0.N-7 piezoelectric micromachined ultrasonic transducers. Unlike conventional device optimization approaches that require complex structural redesign or meticulous process control during fabrication, ferroelectric activation offers a scalable post-process treatment applicable at the wafer level for mass manufacturing. Through controlled domain reorientation and intrinsic stress relaxation within the piezoelectric stack, it achieves comprehensive acoustic performance enhancement: 1.2-1.7x improvement in electromechanical coupling coefficient, 5-33% increase in transmit displacement sensitivity, and 14-21% increase in transmit pressure sensitivity at 10 cm, enabling simultaneous transmit and receive dual-mode performance enhancement for acoustic transducer optimization.
This paper reports a process for fabricating micro-scale permanent magnet thin films on flexible substrates through electro-deposition method under low-temperature conditions. By dispersing the MAX-phase material Ti3AlC2 in the plating bath and applying an external magnetic field during deposition, we synthesize a CoNiMnP-Ti3AlC2 composite film. The film shows a 69.3% increase in coercivity (75.72 Oe) and a 71.6% improvement in maximum magnetic energy density per unit thickness relative to conventional CoNiMnP films. These enhanced magnetic properties, together with process compatibility and scalability, make the CoNiMnP-Ti3AlC2 film a promising candidate for flexible magnetic MEMS with high performance and versatility.
