Применение Метода Фокусированных Ионных Пучков Для Модификации Зондовых Датчиков Атомно-Силовых Микроскопов

Results of atomic force microscopy (AFM) probes-cantilevers modification by focused ion beams (FIB) experimental researches are presented. With use of FIB treatment are received cantilevers with tip radius than 10 nm and aspect ratio 1:50. With the help it is ionic-stimulirovannogo sedimentation by FIB are received cantilevers with a tungsten tip in length 5 microns and radius 50 nm. It is shown that application modified by FIB probes allows increasing resolution and reliability of measurements of test objects by AFM. The received results can be used at research of microand nanoelectronics, microand nanosystems structures.