A 600-Ghz CMOS Array Detector

This study develops a 600-GHz band array detector in a 65-nm CMOS technology. The unit pixel detector is based on a common-gate differential pair integrated with an on-chip differential patch antenna. A detector array was completed by arranging 36 pixels in a 6×6 configuration and integrating switches for row/column selection and signal path. The array exhibited average responsivity and NEP (noise equivalent power) of 1,320 V/W and 114 pW/Hz0.5, respectively. Imaging experiments were conducted at approximately 600 GHz by utilizing the developed array detector.