ИССЛЕДОВАНИЕ РЕЖИМОВ ПОЛУЧЕНИЯ КАТАЛИТИЧЕСКИХ СТРУКТУР ИЗ ПЛЕНКИ Ni ДЛЯ ВЫРАЩИВАНИЯ УГЛЕРОДНЫХ НАНОТРУБОК

Catalytic centers are formed on a substrate of nickel film on a silicon substrate with a sublayer of vanadium, heated in the reactor module nanotech complex NANOFAB NTF-9 in the working atmosphere of ammonia gas, and argon. Were investigated regimes of catalytic centers in various stages of their formation is also carried out experiments on the effect of pressure on the activation phase. The dependencies of their geometric parameters such as diameter, average height, roughness, volume, and others from the formation temperature. Information obtained from the plots, possible to optimize the growth process of carbon nanotubes by plasma enhances chemical vapor deposition.