Catalytic centers are formed on a substrate of nickel film on a silicon substrate with a sublayer of vanadium, heated in the reactor module nanotech complex NANOFAB NTF-9 in the working atmosphere of ammonia gas, and argon. Were investigated regimes of catalytic centers in various stages of their formation is also carried out experiments on the effect of pressure on the activation phase. The dependencies of their geometric parameters such as diameter, average height, roughness, volume, and others from the formation temperature. Information obtained from the plots, possible to optimize the growth process of carbon nanotubes by plasma enhances chemical vapor deposition.

This paper represents the of experimental studies modes of forming a vertically-oriented arrays of carbon nanotubes (CNT) and subsequently modified by focused ion beam (FIB) to create a hybrid of carbon nanostructures (HCNT). Also this paper covers issues connected with study of formation mechanics and growth of CNT, modification of CNT under the FIB influence and defining technological process characteristics of HYNT formation. Experimental studies on creation of HCNTs are performed, which resulted in making of modified Y-branched hybrid carbon nanostructures and nanostructures covered with carbon scales that are more developed surface and complex geometric shapes.

The idea is to present the results of production methods of nanoelectronics materials and structures and nanosystems technique based on the cluster type automatic platform NANOFAB NTK-9. Experimental research of microand nanofluidics systems using focused ion beam milling. Milling of microlenses structures. Vanadium and Zinc oxide thin film deposition and their properties researching. Growing aligned arrays of hybrid carbon nanostructures.