SiC Power Switch Module

A hermetic, multichip power package for silicon carbide devices that will operate in a 200°C ambient and switch 50 to 100 amps has been developed. The Al2O3/MoCu structure, upon which the SiC JFETs and diodes have been attached, was designed in a manner to hermetically seal the device areas. Details of the materials and processes used to fabricate the package are discussed. Die attach, ribbon bonding and lid attach are also described.