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    专

    三维测力传感器和应用三维测力传感器的手术微器械指尖

    11011146923A1
    发明人
    于凌涛, 闫昱晟, 王正雨, 王文杰, 杨景, 任思旭, 于晓砚, 谷庆, 邵兆稳, 安琪
    受让人
    UNIV HARBIN ENG
    申请人
    쑤저우 레킨 세미컨덕터 컴퍼니 리미티드
    申请号
    3132976
    申请日
    1993-12-06
    公开(公告)号
    11011146923A1
    公开(公告)日
    2023-08-31
    IPC分类号
    B63B025/08G01F023/04
    CPC分类号
    -
    优先权号
    200410072919
    优先权日
    2004-11-25
    摘要

    NOVELTY - The device has rising strobe signal generation units (331, 332) generating rising strobe signals in response to rising and falling delay locked loop (DLL) clock signals, respectively, where the rising strobe signals have opposite phases and are activated at same timing. Falling strobe signal generation units (333, 334) generate falling strobe signals in response to the falling and rising DLL clock signals, respectively, where the falling strobe signals have opposite phases and are activated at same timing.

    USE - Semiconductor memory device i.e. double data rate synchronous dynamic RAM (DDR SDRAM).

    ADVANTAGE - The device removes a skew between the clock signals by individually generating the clock signals used for a final data output, so that the clock signals are activated at the same timing, thus ensuring a data valid window of outputted data in a sufficient manner and improving deviation of output cross point voltage from termination voltage characteristics.

    DESCRIPTION OF DRAWING(S) - The drawing shows a block diagram of the semiconductor memory device.

    Delay locked loop (310)

    Rising strobe signal generation units (331, 332)

    Falling strobe signal generation units (333, 334)

    Data output unit (350)

    权利要求
    1. The pattern transferring mold used in a pattern transferring apparatus which brings the mold into contact with a photo-curing resin on a substrate and cures the photo-curing resin by light irradiation to transfer a pattern formed in on the mold onto the photo-curing resin, the pattern transferring mold comprising: a bottom face which contacts the photo-curing resin, the bottom face portion including a first area in which the pattern is formed and a second area formed outside the first area on the periphery of the mold, wherein the pattern-transferring mold has a mold releasing shape in the second area, the mold releasing shape providing a starting area of mold release from the cured photo-curing resin, and wherein the mold-releasing shape has a depressed shape whose size is larger than that of the depressed portions in the pattern.
    2. The pattern transferring mold according to claim 1 , wherein at least part of the second area contacts the photo-curing resin.
    3. The pattern transferring mold used in a pattern transferring apparatus which brings the mold into contact with a photo-curing resin on a substrate and cures the photo-curing resin by light irradiation to transfer a pattern formed in on the mold onto the photo-curing resin, the pattern transferring mold comprising: a bottom face which contacts the photo-curing resin, the bottom face portion including a first area in which the pattern is formed and a second area formed outside the first area on the periphery of the mold, wherein the pattern-transferring mold has a mold releasing shape in the second area, the mold releasing shape providing a starting area of mold release from the cured photo-curing resin, and wherein the mold-releasing shape has a protruded shape whose height is larger than that of the protruded portions in the pattern.
    4. The pattern transferring mold according to claim 3 , wherein the protruded shape has a shape whose cross section becomes small towards the substrate.
    5. The pattern transferring mold used in a pattern transferring apparatus which brings the mold into contact with a photo-curing resin on a substrate and cures the photo-curing resin by light irradiation to transfer a pattern formed in on the mold onto the photo-curing resin, the pattern transferring mold comprising: a bottom face which contacts the photo-curing resin, the bottom face portion including a first area in which the pattern is formed and a second area formed outside the first area on the periphery of the mold, wherein the pattern-transferring mold has a mold releasing shape in the second area, the mold releasing shape providing a starting area of mold release from the cured photo-curing resin, and wherein the second area is an area corresponding to a scribe line that is formed on the photo-curing resin.
    6. A pattern transferring apparatus which brings a pattern transferring mold into contact with a photo-curing resin on a substrate and transfers a pattern formed on the mold onto the photo-curing resin by light irradiation to transfer a pattern formed in on the mold onto the photo-curing resin, the pattern transferring apparatus comprising: a pattern transferring mold including a bottom face which contacts the photo-curing resin, the bottom face portion including a first area in which the pattern is formed and a second area formed outside the first area on the periphery of the mold, wherein the pattern-transferring mold has a mold releasing shape in the second area, the mold releasing shape providing a starting area of mold release from the cured photo-curing resin, and wherein the mold-releasing shape has a depressed shape whose size is larger than that of the depressed portions in the pattern; and an optical system which irradiates a photo curing resin contacting the pattern transferring mold with light.
    7. A pattern transferring apparatus which brings a pattern transferring mold into contact with a photo-curing resin on a substrate and transfers a pattern formed on the mold onto the photo-curing resin by light irradiation to transfer a pattern formed in on the mold onto the photo-curing resin, the pattern transferring apparatus including: a pattern transferring mold including a bottom face which contacts the photo-curing resin, the bottom face portion including a first area in which the pattern is formed and a second area formed outside the first area on the periphery of the mold; and a material supplying unit which supplies material for providing a starting area of mold release from the cured photo-curing resin between the second area and the uncured photo-curing resin; wherein the second area is an area corresponding to a scribe line that is formed on the photo-curing resin.
    8. A device manufacturing method comprising: preparing a pattern transferring apparatus which brings a pattern transferring mold into contact with a photo-curing resin on a substrate and transfers a pattern formed on the mold onto the photo-curing resin by light irradiation, the pattern transferring apparatus including: a pattern transferring mold and an optical system which irradiates a photo-curing resin contacting the pattern transferring mold with light, wherein the pattern-transferring mold includes a bottom face which contacts the photo-curing resin, the bottom face portion including a first area in which the pattern is formed and a second area formed outside the first area on the periphery of the mold, wherein the pattern-transferring mold has a mold releasing shape in the second area, the mold releasing shape providing a starting area of mold release from the cured photo-curing resin, and wherein the mold-releasing shape has a depressed shape whose size is larger than that of the depressed portions in the pattern; and transferring the pattern onto the photo-curing resin using the pattern transferring apparatus.
    9. A device manufacturing method comprising: preparing a pattern transferring apparatus which brings a pattern transferring mold into contact with a photo-curing resin on a substrate and transfers a pattern formed on the mold onto the photo-curing resin by light irradiation, the pattern transferring apparatus including: a pattern transferring mold and an optical system which irradiates a photo-curing resin contacting the pattern transferring mold with light, wherein the pattern-transferring mold includes a bottom face which contacts the photo-curing resin, the bottom face portion including a first area in which the pattern is formed and a second area formed outside the first area on the periphery of the mold, wherein the pattern-transferring mold has a mold releasing shape in the second area, the mold releasing shape providing a starting area of mold release from the cured photo-curing resin, and wherein the mold-releasing shape has a protruded shape whose height is larger than that of the protruded portions in the pattern; and transferring the pattern onto the photo-curing resin using the pattern transferring apparatus.
    10. A device manufacturing method comprising: preparing a pattern transferring apparatus which brings a pattern transferring mold into contact with a photo-curing resin on a substrate and transfers a pattern formed on the mold onto the photo-curing resin by light irradiation, the pattern transferring apparatus including: a pattern transferring mold and an optical system which irradiates a photo-curing resin contacting the pattern transferring mold with light, wherein the pattern-transferring mold includes a bottom face which contacts the photo-curing resin, the bottom face portion including a first area in which the pattern is formed and a second area formed outside the first area on the periphery of the mold, wherein the pattern-transferring mold has a mold releasing shape in the second area, the mold releasing shape providing a starting area of mold release from the cured photo-curing resin, and wherein the second area is an area corresponding to a scribe line that is formed on the photo-curing resin; and transferring the pattern onto the photo-curing resin using the pattern transferring apparatus.
    11. The pattern transferring mold according to claim 3 , wherein at least part of the second area contacts the photo-curing resin.
    12. The pattern transferring mold according to claim 5 , wherein at least part of the second area contacts the photo-curing resin.
    13. A pattern transferring apparatus which brings a pattern transferring mold into contact with a photo-curing resin on a substrate and transfers a pattern formed on the mold onto the photo-curing resin by light irradiation to transfer a pattern formed in on the mold onto the photo-curing resin, the pattern transferring apparatus comprising: a pattern transferring mold including a bottom face which contacts the photo-curing resin, the bottom face portion including a first area in which the pattern is formed and a second area formed outside the first area on the periphery of the mold, wherein the pattern-transferring mold has a mold releasing shape in the second area, the mold releasing shape providing a starting area of mold release from the cured photo-curing resin, and wherein the mold-releasing shape has a protruded shape whose height is larger than that of the protruded portions in the pattern; and an optical system which irradiates a photo curing resin contacting the pattern transferring mold with light.
    14. A pattern transferring apparatus which brings a pattern transferring mold into contact with a photo-curing resin on a substrate and transfers a pattern formed on the mold onto the photo-curing resin by light irradiation to transfer a pattern formed in on the mold onto the photo-curing resin, the pattern transferring apparatus comprising: a pattern transferring mold including a bottom face which contacts the photo-curing resin, the bottom face portion including a first area in which the pattern is formed and a second area formed outside the first area on the periphery of the mold, wherein the pattern-transferring mold has a mold releasing shape in the second area, the mold releasing shape providing a starting area of mold release from the cured photo-curing resin, and wherein the second area is an area corresponding to a scribe line that is formed on the photo-curing resin; and an optical system which irradiates a photo-curing resin contacting the pattern transferring mold with light.
    15. The pattern transferring apparatus according to claim 13 , wherein the protruded shape has a shape whose cross section becomes small towards the substrate.
    说明书
    [0001]1. Audio player 1.1 : Perspective 1.2 : Front 1.3 : Back 1.4 : Left 1.5 : Right 1.6 : Top 1.7 : Bottom The broken lines indicate portions of the article that form no part of the claimed design.
    同族专利
    暂无同族专利