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    Fluid control system for delivering pulse of process gas to e.g. plasma etcher during chemical processes, has mass flow controller including controller to control flow of fluid through control valve based on feedback from flow sensor.

    1987115651B1
    发明人
    DING J, LBASSI M, HILL G
    受让人
    エム ケー エス インストルメンツ インコーポレーテッドMks Instruments,Incorporated, エム ケー エス インストルメンツ インコーポレーテッド
    申请人
    Norman Chan
    申请号
    3417354
    申请日
    2007-01-04
    公开(公告)号
    1987115651B1
    公开(公告)日
    1984-05-10
    IPC分类号
    G01C009/16G01C015/10G01B011/26G01C009/12G01C009/00G01B009/10G01C001/00G01C000/00
    CPC分类号
    -
    优先权号
    2247204
    优先权日
    1972-09-21
    摘要

    NOVELTY - The apparatus has a base portion (600) arranged on a lift pin portion. A sensing unit is provided on the base portion. A sensor is configured to measure distance between a cg and the base portion. The base portion is arranged on an outer side of a support (210) on which a substrate is supported. A determining unit determines an etched amount of a focus ring (250) by comparing first data received from the sensing unit with a second data constituting initial height information of the ring. A central element (611) is provided in the base portion. An outer element (612) is arranged outside the element.

    USE - Apparatus for inspecting focus ring used in a substrate processing apparatus (claimed).

    ADVANTAGE - The determining unit determines an etching amount of the focus ring by comparing the first data from the sensing unit with the second data constituting initial height information so as to prevent process delay.

    DESCRIPTION OF DRAWING(S) - The drawing shows an enlarged front view of an apparatus for inspecting focus ring used in a substrate processing apparatus.

    210Support

    250Focus ring

    600Base portion

    611Central element

    612Outer element

    权利要求
    1 . A condensate discharge device of an intercooler for a vehicle, including a cooler core disposed between an inlet tank and an outlet tank and configured to cool air introduced from the inlet tank and discharge the cooled air to the outlet tank, the condensate discharge device comprising: an ejector hose disposed between the inlet tank and the outlet tank to form a flow path for an air flow between the inlet tank and the outlet tank; an ejector housing disposed on one side of the outlet tank, wherein condensate collected in the outlet tank is introduced into the ejector housing; and an ejector nozzle disposed in the ejector housing and configured to inject the air introduced from the ejector hose into an inner space of the outlet tank, and when injecting the air, to inject the condensate, which is introduced from the outlet tank into the ejector housing, injecting the inner space of the outlet tank with the air.
    2 . The condensate discharge device of claim 1 , wherein: the ejector housing includes a condensate inlet aperture for connecting an inner space of the ejector housing to the inner space of the outlet tank; and the condensate collected in the outlet tank is introduced from the outlet tank into the ejector housing through the condensate inlet aperture.
    3 . The condensate discharge device of claim 2 , wherein the ejector housing includes: a nozzle insertion portion into which a rear end portion of the ejector nozzle is inserted; a condensate injection portion disposed behind the nozzle insertion portion and configured to discharge the air injected from the ejector nozzle and the condensate introduced into the ejector housing to the inner space of the outlet tank; and a condensate inlet disposed on a rear end portion of the nozzle insertion portion and protruding outward the nozzle insertion portion, wherein the condensate inlet aperture is disposed on a front end portion of the condensate inlet.
    4 . The condensate discharge device of claim 3 , wherein an inner diameter of the condensate injection portion is less than that of the nozzle insertion portion.
    5 . The condensate discharge device of claim 3 , wherein: the condensate inlet is disposed on a bottom portion of the outlet tank; and a condensate collection portion in which the condensate is collected is disposed on the bottom portion of the outlet tank, wherein the condensate collection portion is disposed adjacent to the condensate inlet aperture.
    6 . The condensate discharge device of claim 3 , further comprising: an air injection portion configured to discharge the air toward the condensate injection portion and disposed on the rear end portion of the ejector nozzle, wherein the air injection portion is disposed in front of the condensate injection portion.
    7 . The condensate discharge device of claim 6 , wherein the air injection portion and the condensate inlet are disposed linearly.
    8 . The condensate discharge device of claim 6 , wherein an inner diameter of the air injection portion is less than an inner diameter of a front end portion of the ejector nozzle.
    9 . The condensate discharge device of claim 3 , wherein the outlet tank includes a discharge portion connected to a front end portion of an intake manifold and the discharge portion is disposed behind the ejector housing based on a flow direction of the condensate discharged from the condensate injection portion of the ejector housing.
    10 . The condensate discharge device of claim 3 , wherein a flange is disposed on an outer surface of the ejector nozzle and when the rear end portion of the ejector nozzle is inserted into the nozzle insertion portion of the ejector housing, the flange guides an insertion position of the ejector nozzle by being hooked to the outer surface of the ejector housing.
    11 . The condensate discharge device of claim 3 , wherein an O-ring is disposed on the outer surface of the ejector nozzle; and the O-ring is brought into abutting contact with the outer surface of the ejector nozzle and an inner surface of the nozzle insertion portion to prevent the air from leaking between the outer surface of the ejector nozzle and the inner surface of the nozzle insertion portion.
    12 . The condensate discharge device of claim 3 , wherein an opening is disposed at a final end of the condensate inlet and an ejector cap is installed on the opening to seal the final end of the condensate inlet.
    13 . The condensate discharge device of claim 1 , wherein the ejector hose is disposed outside the cooler core.
    14 . The condensate discharge device of claim 1 , wherein the inlet tank is disposed behind a compressor of a turbocharger driven by an exhaust gas discharged from an engine, and air compressed by the compressor is introduced into the inlet tank.
    说明书
    [0001]FIG. 1 is a perspective view of the water filter device and housing that illustrates the novel design; FIG. 2 is a left view of the device and housing of FIG. 1 ; FIG. 3 is a right view of the device and housing of FIG. 1 ; FIG. 4 is a front view of the device and housing of FIG. 1 ; FIG. 5 is a rear view of the device and housing of FIG. 1 ; FIG. 6 is a top view of the device and housing of FIG. 1 ; and, FIG. 7 is a bottom view of the device and housing of FIG. 1 .
    同族专利
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