The results of investigations into the formation process of polysilicon elements in the presence of a complex relief in the form of silicon islands in a silicon-on-insulator (SOI) structure are presented. The optimal production parameters of the process are found and their determining physicochemical mechanisms are described. A novel organization concept of vacuum-plasma etching of polysilicon elements in the presence of a complex relief is proposed. Reactive-ion etching of polysilicon elements during the formation of the structures of circuits with elevated radiation resistance, such as SOI, is developed and optimized.

New methods for silicon nanostructuring and the possibility of raising the aspect ratios of the structures being formed are considered. It is shown that the technology developed relates to self-formation methods and is an efficient tool for improving the quality of field-emission cathodes based on carbon nanotubes (CNTs) by increasing the Si–CNT contact area and raising the efficiency of the heat sink.

Structured carbon-nanotube arrays synthesized in topological regions formed by electron-beam lithography are studied. The effect of the morphology and topology of the carbon-nanotube arrays on the emission characteristics of the structures being formed are considered.

The possibility of creating increased-capacity thin-film lithium batteries using nanostructured composites is studied. It is shown that the developed structure formation method is distinguished for the technological effectiveness and the obtained composite for the increased capacity and improved cycling as compared to the bulk silicon.

The results of modeling the sub-millimeter TWT electron optical system with a low-voltage control based on the experimental data of the planar array cathode-gate structure with carbon nanostructures are performed in this work. It is shown that the cathode-gate structure including in the analyzed field emission electron gun manufacturing by lithographic processes and CVD technologies may provide the formation a long electron beams with current density of 15,5 A/cm2.

Technology for the production of an array of ordered nanoemitters based on carbon nanotubes is developed. The technological parameters of the fabrication of carbon nanotubes are chosen. It is shown that the structures produced exhibit field electron emission with an emission current of 8 μA and a threshold voltage of 80 V

Specific conductivity of micron- and submicron-size composite nanomaterial layers based on biocompatible carboxymethylcellulose matrix and multi-walled carbon nanotube filler was studied. An ultra-dispersive suspension was applied to soft (aluminum foil, polyimide and polyester, cotton fabric, office paper) and hard (cover glass, silicon) surfaces using a silk-screen process. Specific conductivity of layers with thickness within the range 0.5-5 μm was demonstrated to be ~1.2⋅104-4⋅104 S/m, whereas the highest conductivity of the surface square was approximately 0.2 S. The examined nanomaterial can be used in electronics and biomedical engineering.

Specific conductivity of the composite nanomaterial layers with micron and submicron dimensions, consisting of carboxymethyl cellulose (CMC) and multiwalled carbon nanotubes (MWCNT) was investigated. Ultradispersed aqueous suspension was deposited on soft (aluminum foil, plates made from polyester and polyimide, cotton fabric, office paper) and solid (coverslip, silicon wafers with silicon oxide layer) substrates by silk-screen printing. Electrical resistance was measured by four-probe method and by the method of square on surface from which the conductivity and conductivity per square of surface were calculated taking into account layer’s geometric dimensions. Specific conductivity of the layers with thickness range 0.5 - 5 μm was ~1.2×104÷4×104 S/m, and max conductivity per square was ~ 0.2 S. Investigated nanomaterial is attractive to electronic and biomedical applications.

The process of the formation of column-shaped carbon nanostructures by plasma-enhanced chemical vapor deposition is explored. Carbon nanocolumns are formed at 250°C. The structure and properties of the structures are studied by atomic-force microscopy, scanning electron microscopy, transmission electron microscopy, and Raman spectroscopy. The electrical properties of the structures are investigated.

The results of the research and development of the moisture-sensitive elements based on the carbon nanotubes (CNT) array are presented. It was shown that CNT arrays that were grown by low-temperature plasma enhanced chemical vapor deposition (PECVD) method on the planar Si structures exhibit extremely high moisture sensitivity. The structure resistance ratio in dry and moisture conditions exceed 400. Such relatively high change in resistances is conditioned by the pattern of change of the charge carrier’s conductivity between certain nanotubes in the bundle when water molecules adsorption occurs.

Electroconductivity laser stimulation (irradiation) of composite layers based on carboxymethyl cellulose (CMC) and multiwalled carbon nanotubes (MWCNT) has been researched. The layers were deposited on the following substrates: flexible such as polyimide, polyester, aluminum foil paper, cotton fabric and shop paper (~80 g/m2]; hard substrates such as Si/SiΟ2 and cover glass. The conductivity of layers with thickness 0.5 10 μm was improved more on 500 % /(W/cm2) after laser stimulation (wavelength 970 nm, emission specific power PS~0.051 W/cm2, concentration C~0.05 wt.% MWCNT).

A physical-chemical silicon etching model is described; an etching profile is calculated by the string method; and model adequacy is considered. The simulation results of the groove etching process as function of process optimization parameter variations are analyzed.

Research results on the synthesis of carbon nanotube arrays using a combined catalyst are presented. Thanks to optimal synthesis parameters such as temperature, the reagent flow rate, the concentration and type of organometallic compound, and the composition of the catalyst film, a new synthesis method for the arrays of carbon nanotubes (CNTs) of a given topology is developed. The influence of the size effects of topological elements on the characteristics of the CNT arrays is studied. The results of a statistical analysis and research into the CNT morphology by transmission and scanning electron microscopy are shown.

In this work showed the possibility of creation high capacity thin-film lithium batteries with the Si-CNT nanocomposite anodes. Synthesized multiwall carbon nanotubes were covered by amorphous silicon with magnetron sputtering. Developed method of formation nanostructured composite is simple, efficient and compatible with widely spread equipment. As s result, designed anode structures with deposited Si thickness of 260 and 390 nm exhibit high specific capacities (more than 2500 mAh/g) and significantly improved cycling stability versus silicon films.

It has been shown that the deposition of carbon nanotubes from CO could take place at very low temperatures by adding hydrogen to the gas mixture. Adding hydrogen significantly changes the nature of the chemical vapor deposition process. It has been demonstrated that at a certain ratio CO : H 2 this gas mixture on the one hand could be used for the deposition of carbon structures at low temperatures and on the other hand for the etching of carbon structures at high temperatures. Thus, the same gas mixture can be both a source of carbon and its etchant depending on temperature. We have also demonstrated that carbon nanotubes of good quality without impurities of amorphous carbon, soot or graphite can be formed from the gas mixture of CO + H 2 at low temperatures.

The properties of the composite nanomaterials (CNM) based on bovine serum albumin (BSA) and multi-walled carbon nanotubes (MWCNT), both functionalized and non-functionalized, were investigated. In order to obtain the solid-state bulk CNM from the ultradispersed aqueous solutions of 25 wt.% BSA and (0.0015 - 0.04) wt.% MWCNT, the methods of nanotechnology and laser technology were used. It is revealed that the CNM density is 10% - 20% higher than that of water and the hardness is higher than that of BSA by a factor of 3 - 6 times. An increase in hardness Hv (by Vickers) of CNM correlated with an increase in the concentration of MWCNT, and Hyreached ~300 MPa for the case of the non-functionalized MWCNT, while for the case of the functionalized MWCNT, i.e. MWCNTf, Hy was 25% lower.

A fundamental thermodynamic model of formation of catalyst clusters for growing carbon nanotubes has been developed and model predictions have been compared with the experimental data. An expression for the size distribution function of clusters, depending on the conditions of their formation, is obtained. It is shown that surface tension plays an important role in the cluster formation. The surface tension coefficient for iron clusters at 950°C is determined.