The aim of this study was to analyze the phase composition of metal films formed by plasma-assisted vacuum arc deposition due to evaporation of a near-equiatomic TiNbZrTaHf cathode. High-temporal- resolution data were obtained by an in situ X-ray diffraction analysis using synchrotron radiation. The use of this technique made it possible to identify the time interval of formation of the films and that of change in their phase composition. It was revealed that the film growth occurred in three stages. At the first stage of film deposition, (3 phase (bcc lattice, a = 0.34748 nm) was identified. At the second stage, an amorphous-crystalline phase formed, as evidenced by the rise in the background of the diffraction line in the angular range of 2 theta = 24-25 deg. At the third, final stage, the diffraction lines of omega phase (hexagonal lattice; a = 0.46636 nm and c = 0.27872 nm) and alpha phase (hcp lattice; a = 0.31261 nm and c = 0.47846 nm) were detected. After completion of the deposition process, the films contained 84 wt.% (3 phase, 14 wt.% alpha phase, and 2 wt.% omega phase.

The formation of nitride coatings based on the titanium (Ti), niobium (Nb), zirconium (Zr), tantalum (Ta), and hafnium (Hf) (i.e., TiNbZrTaHf) high-entropy alloy (HEA) was studied by in situ X-ray diffraction analysis using synchrotron radiation. HEA-based nitride coatings were formed as thin films (1.5-2 mu m) by plasma-assisted vacuum arc deposition. The multielement gas-metal plasma used was produced by evaporating a near-equiatomic TiNbZrTaHf cathode. In studying the thin film growth in situ with high time resolution, the VEPP-3 electron storage ring was used as a synchrotron radiation source. To verify the data of the in situ X-ray diffraction analysis, electron diffraction spectra of the films were obtained using transmission electron microscopy. It was found that the film growth was a multistage and multiphase process. The deposition of a metallic sublayer on the substrate before coating deposition (the first stage of film synthesis) was accompanied by the formation of a three-phase system represented by beta, alpha, and omega metallic phases, which were in an amorphous-crystalline state. The nitride layer formed on the metal substrate was presented by metal-nitride (MeN) and MeN* phases, which differed in the type of crystal lattice. The diffraction lines of the nitride phases were blurred, which might have been due to the nanocrystalline state (0.7-1.2 nm) of the film.

Studies of a boron-containing coating formed on high-entropy alloy specimens by a complex ion-plasma method were carried out. It is shown that the coating has an amorphous-crystalline structure. The size of the areas of the crystalline state of the material is 3-5 nm. Coating hardness, H = 10.1 GPa; Young's modulus, E = 135 GPa; H/E = 0.075; wear parameter, k = 1.2 x 10(-6) mm(3)/N*m; and friction coefficient, mu = 0.15. For an uncoated substrate, H = 2.1 GPa, k = 2.9 x 10(-4) mm(3)/N*m, and mu = 0.62.

We consider some new and recently modernized vacuum ion-plasma electrophysical facilities used to create dense low-temperature plasma in considerable volumes (≥0.25 m3), as well as a complex unit that includes beam and plasma modules for various processes of electron-ion-plasma modification of the surface of materials and products to improve their functional properties. The paper also provides the examples of modification processes using the developed equipment, as well as the results on improving the properties of modified surfaces.

AlMgB14 and AlMgB14-50 wt % TiB2 coatings deposited onto a VK-8 hard-alloy substrate by ion-plasma sputtering using powder ceramic targets are studied. It is established that the formed coatings are characterized by an amorphous-crystalline structure containing B-B, B-O, and Ti-O interatomic bonds. The composition of the target has a minor effect on the morphology and roughness of the obtained coatings. The hardness of TiB2-free coatings reaches 35 +/- 2 GPa at the lowest friction coefficient of 0.12. It is established that the coatings formed using the AlMgB14-50 wt % TiB2 target possess higher adhesion strength and wear resistance.

The effect of surface modification by an arc discharge plasma in a nitrogen flow with treatment durations of 5 and 10 min on the physicochemical properties and biocompatibility of the surface of composites based on polylactic acid and hydroxyapatite (PLA/HA) with different mass ratios (80/20, 70/30, 60/40) has been investigated. The aim of this work was to show the correlation between the changes of the physicochemical characteristics (chemical compound, morphology, wettability) of the surface layer of the PLA/HA composites and the cell viability (macrophages) in the presence of the plasma-modified materials. The dependence of alterations of the functional properties (wettability, biocompatibility) on the change in the chemical composition under the plasma exposure has been established. The chemical composition was studied using X-ray photoelectron spectroscopy (XPS), the surface morphology was researched with scanning electron microscopy (SEM), and the wettability of the composite's surface was analyzed by measuring the contact angle and surface energy calculation. In addition, the viability of macrophages was investigated when the macrophages from three donors interacted with a modified PLA/HA surface. It was found that the formation of the new functional groups, -C-N and N-C=O/C=O, improves the wettability of the surface of the composites and promotes the viability of macrophages in the presence of the composite materials. The fundamental principles for obtaining promising materials with the required properties for eliminating bone defects have been created.

Thin (3 µm) metal coatings with a columnar nanocrystalline bcc structure composed of crystallites of size 1.5–2.5 nm were formed from a near-equiatomic HfNbTaTiZr cathode through its plasma-assisted vacuum arc evaporation. The hardness of the coatings is 4.7 GPa. Their specific wear rate and friction coefficient measure 1.6 × 10–6 mm3 N–1 m–1 and 0.82, respectively.

On the example of an electron source with a plasma cathode based on a low-pressure arc discharge with grid stabilization of the cathode/emission plasma boundary and an open anode/beam plasma boundary, a new method of electron beam formation is described, in which an additional auxiliary arc discharge is ignited in the anode region of the source. Initiation of the discharge was carried out by the electron beam, and the discharge itself was supported by an additional power source, which represented a low-impedance artificial forming line included in the collector circuit. The dependence of the current in the accelerating gap on the current flowing in the collector circuit was obtained in the absence of the arc discharge current of the plasma cathode.

High-entropy alloys based on refractory metals, possessing an unusual combination of physical, mechanical, tribological, electrophysical, etc. properties, can be recommended for use in various fields of industry and medicine. The aim of the work is to study the growth process of high- entropy alloys films of the Ti-Nb-Zr-Ta-Hf-Cu system in real time by X-ray phase analysis using synchrotron radiation. Experiments on the deposition of multielement metal films were carried out the VEIPS-1 setup developed at the Institute of high current electronics Siberian branch of the Russian academy of sciences for studying the processes of the film and coating formation on a synchrotron radiation source. The process of in situ thin film structure formation with high time resolution was studied using a synchrotron radiation source - the VEPP-3 electron storage ring, the Institute nuclear physics, Siberian branch of the Russian academy of sciences. It is shown that the deposition Ti-Nb-Zr-Ta-Hf-Cu plasma on a HG40 substrate is accompanied by the formation of an amorphous crystalline state represented by phases of the composition (presumably) Ti-Nb-Zr-Ta-Hf-Cu, TiZr, NbZr, and CuTiZr, formed at different stages of film deposition. The main phase is the Ti-Nb-Zr-TaHf-Cu composition.

A study was carried out of the influence of the antifriction coating of the Al-Mg-B system on the high-speed interaction of strikers made of a heavy tungsten-based alloy with an aluminum barrier at varying throwing speed. The coatings were obtained by ion-plasma sputtering using a powder target of the Al12Mg17-B system. Coatings with a thickness of 1.5 microns were obtained on a series of conical strikers. The average coefficient of friction of the resulting coatings was 0.17 at a minimum value of 0.12, the hardness was (35 ± 2) GPa, and the wear rate was 4.65∙10-6mm3/N∙m. The experimental results show the supposed influence of the coating of the Al-Mg-B system on the process of interaction of such strikers with obstacles.

Результатом модификации поверхности металлов и сплавов путем комбинированной обработки (напыления тонких металлических пленок с последующим перемешиванием под действием высокоинтенсивных потоков энергии) является формирование градиентной структуры поверхностного слоя материала, характеризующейся изменяющимися по глубине концентрацией легирующих элементов, фазовым составом и состоянием дефектной субструктуры, что положительно сказывается на механических и трибологических свойствах материала. Целью настоящей работы является формирование высокопрочных силицидо- и нитридосодержащих поверхностных слоев при комплексной обработке в едином вакуумном цикле, включающей нанесение покрытий тугоплавкого металла и кремния, облучение высокоинтенсивным импульсным электронным пучком и дополнительное азотирование в плазме газового разряда низкого давления. Модифицирование, сочетающее многоцикловое (до пяти циклов облучения системы «пленка/подложка») высокоскоростное плавления системы «пленка (Si (0.2 мкм) + Nb (0.2 мкм))/(сталь 40Х) подложка» интенсивным импульсным электронным пучком осуществляли на установке «КОМПЛЕКС» (Институт сильноточной электроники СО РАН) в едином вакуумном пространстве. Часть образцов была дополнительно подвергнута азотированию в плазме газового разряда низкого давления (773-873 К, 1-5 час.). Выполнены исследования и выявлен режим комплексного модифицирования, позволивший многократно повысить износостойкость (более чем в 100 раз) и микротвердость (более чем в 5 раза) поверхностного слоя исходной стали. Высказаны предположения о физической природе повышения трибологических и прочностных свойств материала.

Целью работы является анализ результатов, полученных при исследовании структуры, элементного и фазового состава, прочностных и трибологических свойств борсодержащих покрытий, полученных на высокоэнтропийном сплаве комплексным ионно-плазменным методом. В качестве материала подложки использовали сплав CoFeCrMnNi неэквиатомного состава (25,2Co, 15,1Cr, 37,8Fe, 3,4Mn, 16,3Ni; ат. %). Борсодержащие покрытия элементного состава Al–Mg–Ti–B толщиной 1, 3 и 5 мкм формировали методом ионно-плазменного высокочастотного напыления (магнетронное ВЧ-осаждение в условиях ионно-плазменного ассистирования при использовании генератора газовой (аргон) плазмы «ПИНК»). Для осуществления процесса напыления борсодержащего покрытия была использована мишень диаметром 200 мм, изготовленная из смеси двух порошков AlMgB14 + 50 % TiB2. Для интенсификации процесса распыления мишени был применен генератор газовой плазмы «ПИНК», с помощью которого в рабочей вакуумной камере установки создавалась объёмная аргоновая плазма. При подаче ВЧ потенциала на мишень ионы аргона извлекались из плазмы и бомбардировали мишень, производя ее интенсивное распыление. Формирование покрытия на поверхности подложки происходит в результате подачи на нее напряжения смещения 35 В. Температура подложки при напылении покрытия (350-360) °C. Скорость напыления покрытия 0,05 мкм/мин. Исследования структуры и элементного состава борсодержащего покрытия элементного состава Al–Mg–Ti–B, сформированного на образцах высокоэнтропийного сплава состава CoFeCrMnNi комплексным ионно-плазменным методом осуществляли методами электронной дифракционной микроскопии. Установлено, что покрытие имеет аморфно-кристаллическую структуру. Размер областей кристаллического состояния материала (3-5) нм. Твердость покрытия H = 11,0 ГПа; модуль Юнга Е = 185 ГПа; отношение H/Е = 0,059, параметр износа k = 4×10-7 мм3/Н×м; коэффициент трения μ = 0,12. Для подложки без покрытия H = 2,1 ГПа; k = 2,9×10-4 мм3/Н×м; μ = 0,62.

Р а с с м о т р е н ы р е з у л ь т а т ы , п о л у ч е н н ы е п р и и с с л е д о в а н и и с т р у к т у р ы и с в о й с т в к е р а м и ч е с к и х п л е н о к н а о с н о в е в ы с о к о э н т р о п и й н о г о с п л а в а ( В Э С ) .К е р а м и ч е с к и е п л е н к и В Э С ф о р м и р о в а л и п у т е м о с а ж д е н и я н а м е т а л л и ч е с к и е п о д л о ж к и м н о г о э л е м е н т н о й г а з о -м е т а л л и ч е с к о й п л а з м ы , с о з д а н н о й и о н н о -п л а з м е н н ы м м е т о д о м п р и о д н о в р е м е н н о м р а с п ы л е н и и ч е т ы р е х к а т о д о в ( C u , Z r , N b , T i -5 0 % A l )

Multielement nitride coatings of quasi-equiatomic compositions, (NbMoCrTiAl)N and (NbZrCu-TiAl)N, are synthesized by deposition on a substrate in vacuum from a multicomponent gas-metal plasma. This plasma is generated by a simultaneous independent vacuum-arc evaporation of the cathodes of the selected elements in a plasma-assisted mode in a nitrogen atmosphere. It has been established that the synthesized coatings are single-phase materials with a face-centered cubic crystal lattice. For the (NbZrCuTiAl)N coating composition, the crystal lattice parameter a = 0.44288 nm and for (NbMoCrTiAl)N – a = 0.40540 nm. The resulting nitride coatings have a nanocrystalline multilayer structure. Their microhardness depends on concentration and type of chemical elements, as well as on nitrogen pressure in the gas-metal plasma; it reaches 43 and 46.5 GPa for the (NbMoCrTiAl)N and (NbZrCuTiAl)N coatings, respectively.

A developed vacuum-arc plasma-assisted method is applied to produce films of a high-entropy alloy from a multicomponent gas-metal plasma generated by the simultaneous independent evaporation of selected metal cathodes. New modes are revealed to allow the deposition of thin films of a high-entropy alloy, AlTiCrNbMo–N, with a nearly equiatom composition. The films are a multilayer nanocrystalline material with a body-centered cubic lattice, the parameter of which specifically depends on the concentration of elements in the alloy. The synchrotron-radiation technique demonstrates that films of the high-entropy alloy AlTiCrNbMo–N are stable when heated in air to temperatures not exceeding 620°C.

The effect of low-temperature arc discharge plasma treatment in a nitrogen atmosphere on the modification of the physicochemical properties of PLA-based scaffolds was studied. In addition, the cellular-mediated immune response when macrophages of three donors interact with the modified surfaces of PLA-based scaffolds was investigated. PLA surface carbonization, accompanied by a carbon atomic concentration increase, was revealed to occur because of plasma treatment. Nitrogen plasma significantly influenced the PLA wettability characteristics, namely, the hydrophilicity and lipophilicity were improved, as well as the surface energy being raised. The viability of cells in the presence of the plasma-modified PLA scaffolds was evaluated to be higher than that of the initial cells.