介绍了显示器闪烁度的相关原理及测量方法,根据IDMS等标准中规定的闪烁度测量的对比法和JEITA法,建立了显示器光闪烁度测量装置,量值可溯源至国家时间频率基准和显示器标准,并利用色彩分析仪作为对比,测量了闪烁的频率响应特性,同时对主流CCFL背光和LED背光的液晶显示器闪烁度进行了测量,考察了不同波形对测量结果的影响以及不同方法的适用情况,对显示器测量仪器校准、显示器产品质量评价具有重要应用价值,是建立闪烁度测量标准的基础.

The precision measurement of Avogadro constant and realization of mass unit kg based on atom counting of single crystal silicon require the measurement of the mass and volume of a silicon sphere. The non-homogeneously distributed oxide layer, which is several nanometer thick on the surface of the sphere, is key to the correction value of the above parameters. The coordination system of the Si sphere is determined by Laue crystallography and laser marking. Different driving approaches of the Si sphere are compared. The automatic scanning instrument is set up based on spectroscopic ellipsometer. The repeatability and stability are investigated, with the scanning results of the NIM#3 Si sphere being presented. It is indicated that the short-term repeatability of the ellipsometric scanning of the surface oxide layer reaches 0.04 nm.

The structure,measuring principle and applying properties of a contact-type luminance meter are described. And a light source which can provide a uniform diffuse surface is presented and applied to calibrate three contact-type luminance meters. In comparison with the luminance standard in National Institute of Metrology for verifying contact-type luminance meters,this calibrating method shows good traceability and accurate certified value. Finally,the practicality of applying several commonly diffuse surfaces to calibrate contact-type luminance meters is discussed briefly.

建立了可溯源到国家照度工作标准的有效光强标准装置,该装置由闪光光源、中性滤光片、光度探测器、波形采集和处理单元组成,可定标相关测量仪器.分析了氙灯闪光灯和测试LED闪光灯,LED闪光灯具有上升沿陡峭、稳定性好等优点,可进一步优化作为有效光强标准灯.对影响实验的因素进行了分析,结果表明整套装置测量有效光强的不确定度水平达到2.4％(k=2).

脉冲光源在航空、军事、警示等领域均有重要应用，有效光强是表征脉冲光源光度特性的基本评价参数，有效光强测试仪是测量脉冲光源有效光强的仪器。使用闪光灯对有效光强测试仪进行校准时，由于闪光灯自身的稳定性，会带来较大的误差。在我们建立的有效光强标准装置中，引入监视探测器来监测闪光灯有效光强的变化，可以大幅改善闪光灯自身稳定性对校准结果的影响。

Single crystal silicon (Si) sphere method is an important scheme for precise measurement of Avogadro constant and redefinition of kilogram. The surface oxide layer thickness is related to the correction of the measured mass and diameter of the single crystal sphere, and contributes a large proportion of the relative uncertainty of the Avogadro constant. We discuss several basic problems in measuring the sphere surface by ellipsometer, i.e., the influence of the crystalorientationdependent optical constants and surface curvature induced ellipsometric light beam scattering. And the uncertainty components for the adopted indirect method are analyzed. The study provides both experimental and theoretical bases for the measurement research in surface layer on Si sphere.

介绍能够溯源到国家光谱辐射度、光度与色度基准的标准白场仪装置,可用于显示器光色特性参数测量.对该装置进行了表述,给出了其光谱、稳定性以及光色参数.应用该标准装置对主流的液晶显示器进行了视角研究,并考虑了测量过程中所忽略的被测发光面积因素对视角特性的影响.结果表明,基于绝对亮度的视角阈值方法,差别可达8％以上,这是测量过程中需要考虑和避免的.应用四色矩阵法,针对滤光片式色度计在检测液晶显示器色度、亮度中出现的校准问题进行了初步研究,对正确使用该方法进行相关校准具有借鉴意义.

In spectroscopic ellipsometric measurement, the backside reflection of the glass substrate has great influence on the tested results. Ellipsometric measurement and model calculation are carried out for the silicon nitride film deposited on glass substrate of flat panel displays. The coherent model of the baskside reflection, i.e. "air-substrate-air" is used to calculate and obtain the refractive index of the glass substrate which agrees well with the data provided by manufacturer. Tauc Lorentz model is used in data analysis for the silicon nitride film to discuss the effect of the interface layer between the film and substrate, the surface roughness on the optical constants and model fitting. The results suggest that the inclusion of the interface is necessary for improving the degree of fitting in the case of lattice mismatch between the film and substrate. The optical constants and film structure of the film system are presented.

对相调制光谱椭偏仪进行了用户级别的校准,结合椭偏理论简要讨论了校准的原理,测试结果表明椭偏角准确度达到0.01°.探讨了人为造成的准直调节不一致性以及样品膜层的不均匀性对样品测量结果的影响.对热氧化硅样片测量结果进行了统计分析,该工作是进一步研究椭偏仪误差和校准方法以及阿伏加德罗常数项目硅球表面层研究的基础.

本文对彩色分析仪进行研究,介绍了其测量原理和校准方法.根据实验测量结果,计算其在不同条件下产生的测量不确定度,并给出不确定度概算结果,使彩色分析仪能准确有效地检定液晶显示器(LCD).

By means of phase-modulated ellipsometer, the method for measuring optical constants of photoresist is described. The test scheme and instrument parameters for testing process of photoresist are optimized.For commonly used positive S9912 photoresist, the optical constants for 275~650 nm before/after the exposure are measured, and the dynamic ellipsometry is used to obtain the values before the exposure at wavelengths of interest. The experimental results indicate: the method provided is applicable for the research of photoresist in UV-VIS-NIR spectral range and may find important application in the optical lithography simulation, the development and characterization of new-type photoresist materials.

The technology of extended color gamut of digital television is one of the potential growing directions in the field of display domain.These years, extended color gamut display devices make great progress and LCD displays with LED backlight are commercialized.Three dimensions color gamut measurement method is more correct than traditional one.Calibration method of color blocks in the extended color gamut of digital television is proposed in this paper, it can improve the accuracy of three dimensions color gamut measurement.

The standard white field instrument traceable to the national spectral radiometric,photometric and colorimetric primary standard was set up for characterizing the photometric and colorimetric parameters of displays.The instrument was calibrated and its spectrum,stability and photometric-colorimetric parameters were given.Using the instrument to study the viewing angle of prevail liquid crystal displays,the influence of the variation of the light-emitting surface during the measurement process was considered,which was usually ignored.The results indicate a difference of more than 8% for the absolute-luminance-based viewing-angle threshold method,which should be considered and avoided in the measurement.

TiAlON-based materials applied in solar energy were studied by spectroscopic ellipsometry.Different dispersion formulae such as Cauchy,Lorentz and Tauc-Lorentz models were applied to fit the experimental data of insulation TiAlON film and its optical constants were obtained.The application of the different dispersion models and film structures were compared in various spectral ranges.It is demonstrated that the Tauc-Lorentz model is more suitable for fitting ultraviolet to near-infrared spectroscopy.The results suggest that spectroscopic ellipsometry is a reliable method for characterizing the TiAlON-based material system,and can be used for further study on the optical properties of multi-layer film stacks.

To measure the photometric and colorimetric parameters of digital high-definition flat panel display, the standard measuring devices are established for the measurement of optical parameters of the displays, which traces to the national primary standards for spectral radiometry, photometry and colorimetry. With these devices, the definition for the viewing angle of liquid crystal displays is studied by measuring the contrast ratio, gray level and color difference changing with the viewing angles. Finally, the results based on the formulae of the viewing angle given in the literatures were compared and the applicability of various methods for measuring the viewing angle was discussed.

Recent advances in the design of multichannel ellipsometers based on rotating-element principles have significantly increased their power for applications involving in-situ, real time analysis of thin films and surfaces. The upper spectral limit increases to UUV at the value of 6.5 eV by using a tandem light source configuration. The two rotating compensator ellipsometer to change the polarization state of the incident and reflected beam to get not only the traditional ellipsometric angles (Ψ, △) but also the stokes vector of the reflected beam. This in turn can provide information on sample thickness variations over the beam cross-section and can suppress the effects of multiply-scattered light so that non-uniform and macroscopically rough surfaces can be analyzed. Applications of these advances include flat panel growth by studies of thickness evolution of the phase for silicon film growth.

An automatic calibration equipment is designed for photometric and colorimetric measurement of small size Liquid Crystal Display (LCD) panel, such as luminance, coloremetry, contrast, luminance uniformity and color uniformity. The whole system is automatically controlled by the computer, and data analysis is much faster after the whole panel measurement completed. The efficiency and accuracy of the system show it a powerful tool to meet the requirement of measuring the small size panel and calibrating the spectra instrument in the related area for industry and research institutes.

Methods of calibration on wavelength accuracy and wavelength repeatability, as well as colorimetry accuracy and colorimetry repeatability of spectroradiometer are described. Based on the research of effect factors, the experimental results and experience, the relative expanded uncertainties of colorimetry accuracy are evaluated. It provides a reference example of uncertainty evaluation for the colorimetry fields.

The measurement principle and standard set up for the photometric and colorimetric measurement of digital displays panel are presented.The display principles and characteristics of the major products such as CRT,LCD and PDP are introduced.The whole system was calibrated by standard lamp with the standard transferred from the national primary photometric and colorimetric standard.Incorporated with a new spectral detector and a data collection analysis software based on virtual interface technology,the system can measure the unit under test in real time.The uncertainty of the luminance and chromatic coordinates is better than 2% and 0.005 respectively.Major digital flat panel displays in the market are tested,and their parameters such as relative spectral response,luminance,luminance uniformity,contrast ratio,color gamut are calibrated.The test results and performance comparisons are given.

叙述了中国科学技术大学国家同步辐射实验室800 MeV电子储存环同步辐射的特性及作为光谱辐射亮度基准的原理和方法,精确计算出同步辐射光源光谱功率空间分布,并在计量学上将同步辐射“经典”理论与标定氘灯光谱辐射亮度结合起来,对“同步辐射作为标准源进行光谱辐射功率计量”进行深入的研究。介绍了国家同步辐射实验室计量光束线站的装置,该装置利用同步辐射波长范围宽、亮度高、辐射特性可精确计算等特点,可用于标定传递标准氘灯的光谱辐射亮度（115~350 nm）,并进行了不确定度分析。并与德国技术物理研究院（PTB）标定的氘灯光谱辐射亮度进行比较,两者符合。