Coatings obtained by high-power impulse magnetron sputtering (HIPIMS) were tested using a 64% Ti–16% C–14% Ni–6% Al target (42.5 at % Ti, 42.5 at % C, 7.5 at % Ni, 7.5 at % Al). The microstructure and composition of the coatings were studied using scanning electron microscopy, optical emission spectroscopy of a glow discharge, and X-ray phase analysis. Coatings were studied in terms of their hardness, modulus of elasticity, elastic recovery, resistance to elastic fracture strain, resistance to plastic deformation, friction coefficient and friction-slip wear resistance, resistance to shock-dynamic loading, as well as oxidation resistance. Field tests of coatings on the cutting tool were carried out. Properties of the coatings obtained by direct current and high-power pulse mode were compared. The results showed that the Ti–C–Ni–Al coatings had a dense homogeneous structure, a hardness of 12–26 GPa, an elastic modulus of 143–194 GPa, an elastic recovery of 66–90%, a low friction coefficient of 0.24–0.4, and high oxidation resistance at 800°C. The coating deposited according to the optimal regime confirmed its high practical efficiency during full-scale tests, reducing the cutting tool wear by ~25%.

Ta–Zr–Si–B–C–N coatings were deposited by magnetron sputtering using a TaSi2–Ta3B4–(Ta, Zr)B2 composite target. Ar, as well as Ar + N2 and Ar + C2H4 gas mixtures, were used as the working gas. The structure and composition of the coatings were studied by scanning electron microscopy, glow-discharge optical emission spectroscopy, and X-ray diffraction. A Calowear tester was used to measure the thickness and abrasion resistance of the coatings. Erosion resistance tests were carried out using a UZDN-2T (Russia) ultrasonic disperser. Tribological tests in the sliding friction mode were carried out on an HT Tribometer (CSM Instruments, Switzerland) automated friction machine. The wear zone after tribological testing was examined using a Veeco Wyko 1100 (Veeco, USA) optical profiler. The results showed that the Ta–Zr–Si–B coating was characterised by a columnar structure with an h-TaSi2 crystallite size of 11 nm. The introduction of nitrogen and carbon into the composition of the coatings led to the suppression of columnar growth and a ~2–4-fold decrease in the size of h-TaSi2 crystallites. Carboncontaining coatings demonstrated the best abrasive resistance. The sliding friction tests showed that the Ta–Zr–Si–B coating is characterised by a stable coefficient of friction of 0.3 at a temperature of 25 °C up to the maximum working temperature of 250 °C. The introduction of nitrogen led to an increase in the coefficient of friction up to 0.8–1.0 at a t = 50÷110 °С. The coating with the minimum carbon concentration showed a stable coefficient of friction of ~0.3 up to a maximum temperature of 250 °C. The best result was demonstrated by the sample containing the maximum amount of carbon, with its coefficient of friction remaining at the 0.25 level up to a temperature of 350 °C.

Abstract—Mo–(Y, Zr)–Si–B coatings were obtained by direct current magnetron sputtering (DCMS) and high-power impulse magnetron sputtering (HIPIMS) using composite targets of MoSi2 + 10

This article describes fabrication of coatings in the MoYSiB system with various yttrium contents by magnetron sputtering of MoSiB/Y mosaic targets. The coatings have been analyzed by scanning electron microscopy, X-ray diffraction glow discharge optical emission spectroscopy (GDOES), nanoindentation, and high temperature nonisothermal annealing. It has been established that addition of Y to the coating composition leads to decrease in crystallite size of the h-MoSi2 phase, mechanical properties, and oxidation resistance of the coatings. A protective film consisting of borosilicate glass with inclusions of Y2O3 crystallites forms on the Y-containing coating surface after annealing at 1300°C.

In this study, hard wear-resistant Ti-Si-C coatings were deposited on Cu-Cr materials to improve their performance as sliding electrical contact materials. A ceramic disk composed of Ti3SiC2 and TiC phases was used as a target for DC magnetron sputtering to deposit the coatings. The influence of the power supplied to the magnetron on the chemical composition, structure, and friction coefficient of the coatings was examined. The coatings demonstrated high hardness (23–25 GPa), low wear rate (1–3 × 10−5 mm3/N/m) and electrical resistance (300 μOhm·cm), and fair resistance to electroerosion. The coating deposited at 450 W for 30 min displayed optimal properties for protecting the Cu-Cr alloy from the arc effect.

Coatings in the Ta-Si-N system were deposited by magnetron sputtering in the Ar, N-2 atmosphere and Ar+N-2 gas mixtures. Coatings have been studied in terms of structure and composition, optical characteristics, adhesion strength, fracture toughness, mechanical and tribological properties, as well as oxidation resistance. Nitrogen added to the coatings inhibits the columnar grain growth of the h-TaSi2 phase due to formation of amorphous nitrogen-containing interlayers. The coating deposited in an atmosphere of nitrogen was characterized by optical transmittance up to 90% and reflectivity up to 32% in the visible and infrared spectra. Extremal dependence of adhesion strength, fracture toughness and hardness on nitrogen concentration was observed, with the maximum (Lc(2) >31 N, L=20 N and H=26.7 GPa) corresponding to the Ar:N-2 gas ratio = 1:2. The coating fabricated in an atmosphere of Ar had the lowest friction coefficient (similar to 0.6) and wear rate (< 0.2 x 10(-4) mm(3)N(-1)m(-1)). The coatings with high nitrogen content were resistant to oxidation at temperatures up to 1200 degrees C because of the higher volume fraction of the amorphous phase with the composition close to Si3N4.

Ta–Zr–Si–B–C coatings were deposited by magnetron sputtering (MS) of a TaSi2–Ta3B4–(Ta, Zr)B2 multi-component target in an Ar + C2H4 gas mixture. TaC–Cr–Mo–Ni based coatings were obtained by electro-spark deposition (ESD) using TaC–Cr–Mo–Ni electrode. The composition and structure of the coatings were studied using scanning electron microscopy, energy-dispersive spectroscopy, glow discharge optical emission spectroscopy and X-ray diffraction. Mechanical and tribological properties of coatings were determined using nanoindentation and pin-on-disk tests. The study showed that the coatings have a homogeneous and defect-free structure, with the main structural component being the fcc-TaC phase. The MS coating exhibited a 30 % higher concentration of the TaC phase compared to the ESD coating. The TaC crystallite sizes for the MS and ESD coatings were 3 and 30 nm, respectively. The presence of a high fraction of the carbide phase and small crystallite size for the MS coating resulted in superior hardness (H = 28 GPa) compared to the ESD sample (H = 10 GPa). Both coatings exhibited similar values of the friction coefficient (about 0.15) and demonstrated reduced wear rates (<10–7 mm3/(N·m)). The deposition of coatings on a steel substrate led to a decrease in the friction coefficient by five times and the wear rate by four orders of magnitude. Pilot tests were conducted on coatings applied to wedge gate valve of shut-off devices used in the oil and gas industry for pumping liquids. The results indicated that the service life of the steel wedge gate valve increased by 25 and 70 % with deposited MS and ESD coatings, respectively.

Проведены испытания покрытий, полученных методом высокомощного импульсного магнетронного распыления (HIPIMS) c использованием мишени 64% Ti–16% C–14% Ni–6% Al (42.5 ат. % Ti, 42.5 ат. % C, 7.5 ат. % Ni, 7.5 ат. % Al). Микроструктуру и состав покрытий изучали с помощью сканирующей электронной микроскопии, оптической эмиссионной спектроскопии тлеющего разряда и рентгенофазового анализа. Покрытия были исследованы с точки зрения их твердости, модуля упругости, упругого восстановления, стойкости к упругой деформации разрушения, сопротивления пластической деформации, коэффициента трения и износостойкости при трении-скольжения, стойкости к ударно-динамическому нагружению, а также жаростойкости. Были проведены натурные испытания покрытий на режущем инструменте. Проведено сравнение свойств покрытий, полученных на постоянном токе и при высокомощном импульсном режиме. Результаты показали, что покрытия Ti–C–Ni–Al обладали плотной однородной структурой, характеризовались твердостью 12–26 ГПа, модулем упругости 143–194 ГПа, упругим восстановлением 66–90%, низким коэффициентом трения 0.24–0.4, а также высокой жаростойкостью при 800°С. Покрытие, осажденное по оптимальному режиму, подтвердило высокую практическую эффективность в ходе натурных испытаний, снизив износ режущего инструмента на ~25%.

This work is devoted to the production of Mo-Hf-Y-Si-B-N coatings using magnetron sputtering with varying N2 flow rate; the analysis of magnetron discharge plasma; and the investigation of the structure, and optical, mechanical, and tribological characteristics, as well as crack resistance and oxidation resistance, of the coatings. The results show that Mo-Hf-Y-Si-B-N coatings were characterized by a dense, homogeneous structure. The non-reactive coatings had a maximum growth rate of 270 nm/min. An increase in the flow rate of N2 from 0 to 37.5 sccm led to a decrease in the growth rate by 5.4 times. Mo-Hf-Y-Si-B-N coatings were X-ray amorphous. In non-reactive coatings, the presence of Mo-Si and Mo-B bonds was revealed. The introduction of nitrogen contributed to the formation of an additional Si-N bond, an increase in the proportion of which led to an increase in transmittance. The Mo-Hf-Y-Si-B coating was characterized by a hardness value of 14 GPa. The maximum hardness of 16 GPa was observed in coatings obtained at nitrogen flow rates of 12.5 and 25.0 sccm. A further increase in the consumption of N2 to 37.5 sccm led to a decrease in hardness by 38%. The coating obtained at a flow rate of 25 sccm N2 was characterized by maximum elastic recovery of 57%, elastic strain to failure of 0.098, and resistance to plastic deformation of 0.157 GPa. An increase in nitrogen flow rate from 0 to 12.5 sccm contributed to a decrease in the wear rate of coatings under sliding friction conditions by 40%. The non-reactive Mo-Hf-Y-Si-B coating had the best oxidation resistance at 1000 °C.

Amorphous Ta-Zr-Si-B-C and Ta-Zr-Si-B-N coatings were deposited by magnetron sputtering using a ceramic target in Ar + C2H4 and Ar + N2 reaction media. Thermal stability under in situ TEM heating, vacuum annealing and nanoindentation, as well as the effect of heating on structural-phase transformations in coatings and their mechanical characteristics, have been studied. The results showed that the heating of amorphous Ta-Zr-Si-B-C and Ta-Zr-Si-B-N coatings in a TEM column leads to precipitation h-TaSi2 and c-TaC crystalline phases at a temperature of 600 °C and h-Ta5Si3 and c-TaN at a temperature of 1000 °C, respectively. Similar structural-phase transformations were revealed as a result of vacuum annealing. An increase in temperature from 20 to 1000 °C led to a decrease in the hardness of the carbon-containing coating from 21 to 16 GPa as a result of stress relaxation. For the Ta-Zr-Si-B-N coating at a temperature of 1000 °C, an increase in hardness was observed from 18 to 27 GPa, which is associated with the crystallization of the coating, with the formation of a nanocomposite structure with h-Ta5Si3 and c-TaN crystallites of 6–10 nm in size and an a-Si(Zr,B)N amorphous region.

The Mo–Si–B and Mo–Y–Si–B coatings were obtained by magnetron sputtering in the direct-current mode using a 90

This work is devoted to the production of a ceramic target (ZrSi 2 –ZrB 2 –MoSi 2 )/Cr by hot pressing of products of self-propagating high-temperature synthesis and deposition of coatings in the Zr–Si–Mo–B system by DC magnetron sputtering and high-power pulsed magnetron sputtering. The composition and structure of the initial powder mixtures, SHS products, a two-layer functionally graded target, and coatings deposited during its sputtering have been studied. It is shown that the developed target (ZrSi 2 –ZrB 2 –MoSi 2 )/Cr can be successfully used to obtain coatings with a dense homogeneous defect-free structure, including at high-energy sputtering regimes, peak current of 50 A, and peak power of 50 kW.

In this study, Mo-(Y,Zr)-Si-B coatings were obtained by direct current magnetron sputtering (DCMS) and high-power impulse magnetron sputtering (HIPIMS) using mosaic targets. The results showed that the addition of Y and Zr into the composition of Mo-Si-B coatings led to the suppression of columnar grain growth, a decrease in the crystallite size of h-MoSi2 phase from ~50 to ~5 nm, and an increase in the amorphous to crystalline phases ratio Doping of the Mo-Si-B coating with Y and Zr promoted an increase in oxidation resistance at a temperature of 1000 °C. The introduction of yttrium into the composition of Mo-Si-B contributed to an increase in their crack resistance when heated to 1300 °C. High oxidation resistance of the coatings was provided by a defect-free SiO2 + MoO3 + Y2O3 surface layer. The transition from the DCMS mode to HIPIMS decreased the texture of the Mo-Si-B coatings. The use of an HIPIMS mode led to a decrease in the oxidation rate of Mo-(Y)-Si-B coatings at T = 1000 °C by 1.6–4.5 times compared to DCMS. In the case of Mo-Y-Si-B coatings, the use of HIPIMS led to a decrease of more than 50% in the thickness of the oxide layer at a temperature of 1300 °C.

MoYSiB coatings with various yttrium contents were applied to a heat-resistant nickel alloy by magnetron sputtering. Resistance of the coatings to cyclic impact loading has been tested under varying applied loads. The breakdown areas have been studied using optical profilometry. It has been established that addition of Y into coating composition leads to increase wear resistance of MoSiB coatings, which is related to modification of base coatings.