The mirror in the high-energy laser beam combining system needs to be adjusted quickly and accurately before working. A two-dimensional electronically controlled adjustment mirror is designed. The main body of system adopts an integrated flexible support design. The drive adopts a stepping motor and a deceleration mechanism to drive the screw. The precise measurement of the mirror deflection angle adopts an eddy current sensor and DSP is used as main Control module. The working principle and design of system is analyzed, which conducts in-depth research on the system calibration method and control algorithm. In order to meet the requirements of system adjustment speed, the S-shaped acceleration and deceleration algorithm is applied as the control algorithm of adjustment mirror. A piecewise linear system calibration method is adopted. The system has been tested experimentally, and experimental results show that within the range of ±500″, the in-position time is within 3s, and the control error is less than 2″, which can meet the system requirements.

基于理论设计了一种面内旋转对称的新型5×5分束达曼光栅,研究并优化了光栅制作中曝光、显影及深刻蚀等关键工艺参数.采用接触式曝光和感应耦合等离子体(ICP)刻蚀技术,在石英基底上制作出达曼光栅结构.实验中通过优化石英基底上接触式曝光时间和显影时间,较好控制了曝光图形失真;进一步通过控制ICP刻蚀工艺参数,获得了刻蚀深度为(750±10) nm的石英衬底,实现了达曼光栅器件的制备.通过衍射光学特性评测得到了理论设计的零级衍射场均匀分布的5×5点阵,总的衍射效率达到53％,不均匀性仅为0.19％.实验证明了理论设计与工艺技术的可靠性,为达曼光栅器件的集成光学系统应用奠定基础.