The coatings comprised of the nanodiamond-based and amorphous-carbon-based phases (a-C:ND coatings) are investigated. The a-C:ND coatings were synthesized by chemical vapor deposition in the arc discharge plasma (by plasma chemical deposition) at various concentrations of Ar/H2/CH4. Raman spectroscopy showed that, apart from the diamond substructure, studied coatings contain amorphous-carbon-based and polyene-based phases, while diamond phase is passivated by hydrogen to different degrees. The interplay between the deposition parameters and materials' structure is analysed. It was shown that the ordering of the amorphous substructure and the formation of the phase boundaries affect the electron transport and secondary electron emission properties. The subject of the investigation of the true secondary electron spectra for the analysis of the nanostructured carbon materials is analysed. It was shown that the change of the polyene fraction in the structure of the samples leads to the variation of the ratio of field emission and thermionic emission. The influence of the structure and phase composition of the samples on their electron emission properties is investigated. In particular, their effect on the turn on-field, which value varied in the 9-18 V/μm range for the studied samples, is analysed.

Представлены результаты исследования аморфных углеродных покрытий с инкапсулированными серебряными наночастицами (a-C : Ag). Методом просвечивающей электронной микроскопии показано, что введение низкоэнергетического (100-300 eV) ионного ассистирования в процесс импульсно-плазменного осаждения может в различных случаях привести как к унимодальному, так и к бимодальному распределению серебряных включений по размерам. Установлено, что характер распределения определяется мощностью импульсно-плазменного источника. Рассмотрено влияние вариации потока осаждающихся частиц на процесс ионно-индуцированной поверхностной диффузии на поверхности покрытий. Показано, что данный процесс в совокупности с ионно-индуцированным формированием центров зародышеобразования оказывает влияние на характер распределения серебряных включений по размерам. С помощью спектроскопии характеристических потерь энергии электронов установлено, что изменение поверхностной концентрации серебряных наночастиц коррелирует с соотношением sp2- и sp3-гибридизованных атомов углерода. Ключевые слова:импульсно-плазменное напыление; ионная стимуляция; углерод-серебряный композит; бимодальное распределение частиц; соотношение sp2- и sp3-гибридизованного углерода.

The effect of changes in the energy and current of low-energy (100–600 eV) ion stimulation on the structure of carbon hydrogenated coatings with silver inclusions (a-CH:Ag) synthesized by pulsed-plasma deposition is investigated. Transmission electron microscopy, electron diffraction, electron-energy loss spectroscopy, X-ray photoelectron spectroscopy, and absorption in the UV and visible regions are used to study the influence of the stimulation energy and current on the manifestation of ion-induced effects, such as defect formation, selective silver sputtering, surface diffusion, and silver particle segregation.

The results of an investigation of thin ta -C coatings obtained by the method of pulse-plasma deposition concerning the peculiarities of their structural state and tribological behavior in boundary lubrication conditions have been presented.

In the work we studied films synthesized by RF-sputtering of monocrystalline polydiacetylene (PDA). Investigations of the structure were carried out by Raman spectroscopy, transmission electron microscopy, X-ray photoelectron spectroscopy. We showed that obtained films had heterogeneous structure containing nanoscaled inclusions of initial PDA and irregularly distributed sp/sp2 fragments of carbon chains.

Carbon films were synthesized by pulse-plasma ion-assisted graphite sputtering in the atmosphere of argon-nitrogen mixture. The samples were studied by Raman spectroscopy, electron diffraction and XPS. According to the obtained data, nitrogen efficiently incorporates into the material structure, which leads to the formation of oriented graphite nanoclusters, which fraction reduces with ion assistance energy increase.

The technique of ion-plasma pulse-arc sputtering of graphite in a methane atmosphere has been employed to produce carbon films with different phase composition. Raman spectroscopy and transmission electron microscopy showed that increase of methane concentration in the vacuum deposition chamber leads to the growth of fraction containing sp-hybridized chains. In the investigated films structure, resistivity strongly correlates with the content of sp-hybridized carbon.

Carbon films fabricated by pulsed-plasma ion-assisted sputtering of graphite in argon and nitrogen atmosphere are studied using Raman spectroscopy, electron diffraction, and X-ray photoelectron spectroscopy. The results show that nitrogen is efficiently incorporated in the material structure, which leads to formation of oriented graphite nanoclusters the amount of which increases with an increase in the assistance energy.

Films obtained by radio-frequency sputtering of monocrystalline polydiacetylene (PDA) are under study. The structure is studied by Raman spectroscopy, transmission electron microscopy, and X-ray photoelectron spectroscopy. It is shown that the obtained films have a heterogeneous structure containing agglomerates of nanosized inclusions of the initial PDA and irregular sp/sp2 hybridized carbon chain fragments.

The results of an investigation of the structural peculiarities of the thin ta-C coatings obtained by the method of impulse arc sputtering of graphite and of their tribological tests in boundary lubrication conditions are presented.

Carbon films with different extents of sp hybridization have been grown by ion–plasma pulsed arc sputtering of graphite in a methane atmosphere. Using Raman scattering and transmission electron microscopy data, it has been shown that the content of the phase including carbon chains with sp hybridization grows with increasing methane concentration in the working volume. The resistivity of carbon films correlates well with the fraction of sp-hybridized carbon in the films.

Thin carbon films prepared by pulsed plasma ion-assisted deposition of graphite in an atmosphere of a mixture of argon and nitrogen are studied. The results of characteristic electron energy loss spectroscopy and electron diffraction indicate the increase in the graphite component with increasing ion assistance energy. The use of ion assistance during the film deposition makes it possible to control their resistivity by changing it from 10 5 to 10 2 Ω cm.

In the paper, thin carbon films deposited by pulse-plasma ion-assisted sputtering of graphite in argon-nitrogen gas mixture are discussed. The EELS and electron diffraction showed the graphite phase enlargement with the ion assistance energy increase. Application of ion assistance during the deposition process made it possible to control the films specific resistivity, altering it from 10^5 to 10^2 Ohm⋅cm.