The analysis of the development of the Russian and global nanotechnology market, including gas sensors is presented. The innovative manufacturing technology of multisensor gas-sensitive systems of new generation, based on nanostructured materials is developed.

Interrelation between geometrical parameters PAOA and physic and chemical parameters of anodizing for various conditions of an aluminum surface is investigated. Possibility by management morphostructure PAOA, generated, both in volume, and in film execution is shown.

The description of the diffusion model of oxygen in the films of resistive structures, based on experimental studies on the Fourier spectrometer, and theoretical calculations, provides control output parameters of sensors is presented.

The description of the model gas sensor obtained by the sol-gel technology, taking into account the conditions of measurement is presented. Determine the maximum value of parasitic inductance, built the model of a gas sensor.

The description of a reception technique of gas multisensors on the basis of two types heterostructures with use of the nanostructured materials and results of research of their target parameters аre presented.