The chemical composition, surface morphology, and electrochemical properties of Ti–Al–V alloys in the initial state and after irradiation with О+ ions and alternating irradiation with О+ and N+ ions differing in the irradiation dose of N+ ions are studied. Under irradiation with О+ ions, the active oxidation of Ti atoms is shown to occur, which is accompanied by the formation of titanium oxides and hydroxides. In the course of subsequent irradiation with N+ ions, the accumulation of nitrogen and formation of titanium nitride TiN are found to occur to lower concentrations as compared to those observed without the preliminary irradiation with О+ ions. It is assumed that this is due to the higher chemical activity of oxygen with respect to titanium atoms, as compared to that of nitrogen.

The effect of thermal exposure under high vacuum conditions on the chemical composition of the surface layers of the VT6 alloy with the mixed implantation of N+ ions by a carbon film is investigated. It is shown that under the conditions of thermal exposure the change in the concentration profiles of the distribution of elements is determined by the processes of chemical interaction, in which the diffusion of carbon and nitrogen into deeper layers does not occur. On the contrary, their concentration decreases and this is due to the formation of volatile compounds CO, CO2, or (CH)2 under thermal exposure. Titanium in the surface analyzed layer is in an oxidized state with various degrees of oxidation. Up to a depth of about 10 nm, the oxidation states of titanium are Ti4+ and Ti3+; in the transition region of the film/substrate, Ti2+.

Методами АСМ, РФЭС, РСА, механических и электрохимических испытаний изучено влияние имплантации инертных и химически активных ионов на формирование состава, структуры и модификацию физико-химических свойств тонких поверхностных слоев нержавеющей стали 03Х18Н11, титанового сплава ВТ6, армко-железа с напыленной пленкой углерода и армко-железа с напыленными пленками титан-алюминий. Показано, что имплантация ионов аргона, кислорода и азота приводит к повышению коррозионной стойкости стали 03Х18Н11 как в нейтральной среде, так и в среде, содержащей сильные активаторы коррозии - анионы хлорида. Установлено, что в условиях имплантации ионов N+ в титановый сплав ВТ6 формирование структурно-фазового состояния поверхностных слоев определяется химической активностью атомов азота к атомам титана. Облучение с высокими частотами следования импульсов, углеродных пленок на поверхности армко-железа, ионной имплантацией приводит к проявлению радиационно-термического эффекта, приводящего к коагуляции мелкодисперсных частиц в более крупные образования, и это сопровождается увеличением микротвердости пленок. Исследовано влияние перемешивания ионами аргона на формирование поверхностных слоев покрытия пленок алюминия и титана на подложке армко-железа. Определены параметры ионно-лучевого перемешивания, позволяющие сформировать интерметаллидные соединения (TiAl) в поверхностных слоях напыленной пленки титан-алюминий на подложке армко-железа. The influence of implantation of inert and chemically active ions on the formation of the composition, structure and modification of the physicochemical properties of thin surface layers of stainless steel 03X18N11, titanium alloy VT6, armco-iron with a carbon film sprayed and armco-iron with titanium-aluminum films sprayed has been studied by AFM, RFES, RSA mechanical and electrochemical tests. It is shown that the implantation of argon, oxygen and nitrogen ions leads to an increase in the corrosion resistance of steel 03X18H11 both in a neutral medium and in an environment containing strong corrosion activators - chloride anions. It is established that under the conditions of implantation of N+ ions into the titanium alloy VT6, the formation of the structural-phase state of the surface layers is determined by the chemical activity of nitrogen atoms to titanium atoms. Irradiation with high pulse repetition frequencies, carbon films on the surface of armco-iron, ion implantation leads to the manifestation of a radiation-thermal effect leading to coagulation of fine particles into larger formations, and this is accompanied by an increase in the microhardness of the films...

The paper comparatively studies the effect of implanting O+ ions into the Cu50Ni50 and Cu56Mn44 alloys and M0 copper, as well as N+ ions into the VT6 titanium alloy, the 03Kh17N12M2T stainless steel, and Armco iron, on the formation of the chemical composition and changes in the structural and phase state of the surface layers. It is shown that, under conditions of implantation of ions of chemically active elements, the accumulation of the implanted impurity, the formation of chemical compounds, and their precipitation in the form of phase inclusions are determined by the chemical activity of the implanted element to the alloy components. The results obtained will allow the further development of scientific foundations for the formation of the chemical and structural-phase state in materials under nonequilibrium conditions of ion implantation.

A study and comparative analysis of the mechanical properties of the surface layers of nickel with a sputtered aluminum film, depending on the dose of argon ion irradiation, has been performed. It is revealed that the hardness and the reduced elastic modulus at an indentation depth of 400 nm does not change and remains constant within the permissible measurement error. However, when the penetration depth of the diamond nanotip is 40 nm, the hardness, the reduced elastic modulus, and the stiffness of the samples irradiated with a dose of 10(17) ions/cm(2) increase significantly.

We study the effect of the implantation of N + ions on the chemical composition and atomic structure of the surface layers of VT6 titanium alloy. Nitrogen is accumulated in the surface layers up to concentrations of 30 at % or more, and chemical compounds of titanium nitride TiN are formed as phase inclusions. Presumably, this phenomenon is attributed to certain chemical processes, particularly, the chemical reactivity of titanium atoms and their propensity to interact with nitrogen atoms. Although the integral concentration of oxygen in the surface layers decreases under ion bombardment due to sputtering, oxidation of the components of the VT6 titanium alloy is observed in deeper layers. Oxygen from both the natural-oxide layer and the residual atmosphere in the vacuum chamber, penetrating deeper into surface layers during irradiation, is involved in the oxidation of titanium-alloy components. The accumulation of nitrogen, the formation of titanium nitrides, and the oxidation of the components of the VT6 titanium alloy testify to the significant role of chemical processes in the formation of the structural-phase state of the surface layers of the VT6 titanium alloy under N + -implantation conditions.

The N+ ion implantation effect on the surface morphology, nitrogen accumulation, formation of chemical compounds, and structural and phase state of 03Kh17N12M2T steel and VT6 titanium alloy surface layers has been investigated. Irradiation with N+ ions results in nitrogen accumulation up to 17 at % in stainless steel, and the formation of chemical compounds, such as CrN, Cr2N, MoN, TiN, and Fe4N, in the form of small clusters with the crater-shaped surface. Nitrogen in the titanium alloy is accumulated up to 32 at % to form titanium nitrides, in particular, TiN, in the form of phase inclusions, distributed over the entire surface. The surface morphology of stainless steel is shown to depend on sputtering processes, while that of titanium alloy is shown to depend on the formation of numerous titanium nitride inclusions.

The effect of argon ion irradiation with an energy of 40 keV in the dose range of 10 16 - 10 18 ion/cm 2 on the formation of the surface layers composition, changes in the morphology and mechanical properties (microhardness, and wear resistance) of carbon steel AISI 1020 with a deposited ion-plasma coating Ni 80 Cr 20 was studied. It is shown that irradiation with doses greater than 10 17 ion/cm 2 leads to the formation of a layer consisting of nickel, chromium and iron. The most optimal treatment mode for improving wear resistance is irradiation with a dose of 5.10 17 ion/cm 2 .

The results of studying the X-ray photoelectron spectroscopy of the chemical composition formation of titanium surface layers with a deposited aluminum film after ion-beam mixing are presented. At the selected parameters of ion irradiation, the aluminum films 10 and 20 nm thick are mixed with a titanium substrate. TiAl compounds are formed during mixing.

The formation of nanoscale layers on the VT6 titanium alloy surface by ion-beam mixing of carbon with the N + ion implantation is investigated in this work. Ion-beam mixing in the transition layer of a film–carbon system on the VT6 alloy surface has been found to provide conditions for the formation of titanium carbides and nitrides. The thin surface layer (~10–20 nm) of the samples after both the deposition and ion-beam mixing of a carbon film mostly consists of carbon in a disordered state with sp 2 and sp 3 -hybridized C–C bonds. The formation of titanium carbides and nitrides in the transition layer, a disordered carbon structure in the thin surface layer, leads to a tenfold increase in the corrosion resistance of the samples.

Abstract—The influence of ion beam mixing of carbon on the surface morphology, chemical composition, atomic structure, and microhardness of the surface layers of samples of a VT6 titanium alloy is investigated. It is found that conditions for the formation of titanium carbides are created in the transition layer of the film/substrate system during ion beam mixing. The formation of titanium carbides with both stoichiometric and nonstoichiometric ratios of the components occurs. The concentration of titanium carbides increases with the increase in the irradiation dose and reaches 20 at % at a dose of 4 × 1017 ion/cm2. The mixing manifests itself in the mutual penetration of carbon atoms into the target and target atoms, mainly titanium, into the film. However, a thin surface layer with a depth of about 20 nm which is mainly composed of carbon atoms remains. It is shown that, in this layer, carbon atoms are in a disordered state with both sp2 and sp3 hybridization of the C–C bonds. The formation of titanium carbides in the transition layer and the disordered structure of carbon on the surface of the film during ion beam mixing determines the hardening of the surface layer, and as a result, an increase in the microhardness of the samples by 100% or more occurs. It is shown that the growth in the microhardness is associated with the layer formed as a result of mixing rather than the influence of irradiation on the titanium alloy substrate.

Accumulation of nitrogen in nanosized surface layers of 03Kh17N12M2 stainless steel has been detected upon N + ion implantation up to 14 at % together with metal nitrides, mainly of chromium nitride CrN and interstitial solid solution. It has been demonstrated that N + ion implantation accompanied by preliminary irradiation by Ar + and O + ions decreases maximum nitrogen concentration by at least two times. It is assumed that this is stipulated by segregation to surface layers of iron atoms upon irradiation by Ar + ions as well as formation of chromium oxide Cr 2 O 3 and chromium hydroxide CrOOH upon irradiation by O + ions.

The accumulation of nitrogen to 14 at.% in the nanosized surface layers of samples of 03Х17Н12М2 stainless steel after implantation of N+ ions, the formation of metal nitrides, mainly CrN chromium nitride, and solid solution introduction has been established. It is shown that implantation of N+ ions using pretreatment by Ar+ and O+ ions leads to a decrease in the maximum nitrogen concentration by 2 or more times. It is assumed that this is due to segregation to the surface layers of iron atoms under irradiation by Ar+ ions and the formation of Cr2O3 chromium oxide and CrOOH chromium hydroxide under irradiation by O+ ions.

A complex of studies of the composition, structure, and properties of nanoscale surface layers of titanium alloy VT6 formed by the ion-beam mixing of a carbon nanofilm is conducted. It is found that ion-beam mixing in the transition layer of a film/substrate system provides conditions for the formation of titanium carbides, the content of which increases to 20 at % with an increase in the irradiation dose. After both the deposition and ion-beam mixing of a carbon film, the hyperfine surface layer of the samples mostly consists of carbon atoms in a disordered state with sp2- and sp3-hybridized C–C bonds. It is revealed that the coherent scattering region of samples decreases after ion-beam mixing; this effect can be attributed to an increase in the dislocation density and the formation of dislocation substructures. The formation of titanium carbides, a disordered carbon structure, and dislocation substructures under ion-beam mixing conditions leads to a more than twofold increase in the microhardness of the samples.

The results of studying the X-ray photoelectron spectroscopy of the chemical composition of nickel surface layers with a deposited aluminum film, depending on the dose of irradiation with argon ions, are presented. Analysis of the spectra shows the formation of Ni3Al aluminide during ion-beam mixing. The highest content (~20%) of this compound in the modified layer is observed at an implantation dose of 5 × 1016 cm–2.