In this paper, we present the main results for the theoretical, numerical and experimental analysis of a new method to measure the roughness of metal surfaces. The requirements for a waveguide optical resonator, which is the main optical node of the device implementing this method, have been developed. A comparative analysis of two different designs of an optical node is performed. The energy spectra of the roughness of various surfaces were measured. As a result of the research, the main advantages of the method under consideration and practical recommendations are provided to improve the design of the device that implements this method.

The results of measurements of surface roughness of fluorine-containing glasses are presented using a new methodology for gradient waveguide propagation of the laser radiation. This new method also allows the measurement of the attenuation of optical radiation in the surface layer of glass. The development of multiple experimental investigations confirm the advantages of the method - high sensitivity and simplicity in development.

A new method for measuring the spectrum of surface roughness based on Bragg scattering, is proposed. This method is characterized by its high precision of measurement of the spatial amplitudes and frequencies. Was determined the rang of spatial frequencies (periods) of harmonics in the roughness spectrum surfaces (0,π) (0; π). When the rotation´s angle of grating is (0,π/4) will be a forward scattering or Bragg´s deflector. At rotation´s angle of grating is (π/2,π/4) or (-3π/4,-π/2) will a Bragg´s mirror. The measurements are made in a gradient waveguide, obtained by ion exchange method.

Determining the mean square deviation σ of surface roughness and the imaginary part of permittivity n''of a planar gradient optical waveguides n(y)= n3+Δn'(y)+ in''(y) = n'(y)+ in''(y), using the integral waveguide scattering method. For experiment two samples are prepared. The first sample using exchange with silver ions and obtained a parabolic profile, subsequently the method of solid-state diffusion of lead oxide in the glass substrate provides a waveguide with a Gaussian distribution profile permittivity. In both cases, laser radiation is used with a wavelength of 0.6328 microns.