The optical parallelism is an important indicators of isosceles prism. However, it cannot be directly measured in the processing process, and it is measured when the small surface is coated with silver film, which results in low processing rate. By analyzing the principles of the first optical parallelism and the second optical parallelism, this paper provides a new processing and detection method for isosceles prism. The good verticality between the three working face for isosceles prism and a side face can ensure the second optical parallelism. The small difference of 67.5°can ensure the first optical parallelism. By changing the position of the incident light when testing, the number of reflections can be reduced from seven to three. The reflection principle deduces the formula: θII(7)=2.4θII(3)，which to improve the machining accuracy and avoid the surface imperfections in detection. By using this process, precision and productivity can be effectively improved, the complexity of the process is reduced, and the qualification of isosceles prism has been improved.

Based on the motion relationship of abrasive and workpiece, the abrasive kinds and the crucial parameters in rough lapping, fine lapping, rough polishing and fine polishing were established through a lot of technology experiments firstly in this work. The exploring experiments indicate the high quality surface of SiC plane reflector can be finished in short time. Secondly, the validation experiments were performed on the large scale SiC plane mirror with a size of 225x172 mm(2). As a result, the machining flow sheet was erected. Moreover, the machining tool, abrasive kinds, abrasive size, processing methods and testing solutions were all assembled in response to the flow sheet. The finished of 225x172 mm(2) SiC plane mirror was tested and evaluated. The results show that the surface figure error, i.e. PV, is 0.0117 mu m, and the surface roughness RMS is close to 0.68nm.

In the paper, the ballonet polishing process was introduced to fabricate the aspheric surface. And then the principle and structure of ballonet polishing tool are narrated firstly. Subsequently, the effects of the process parameters such as radius and size of the ballonet tool on aspheric optical component profile and polishing efficiency are analyzed in theory, and a mass of polishing experiments are carried out on a complex aspheric to validate them. Finally, the influencing rules of such effects of the ballonet polishing tool's radius and size on the surface figure and efficiency in polishing aspheric optics are summarized. Moreover, the optimal technological parameters are achieved, which provide with significant references for practically machining different rotary symmetrical aspheric optical components.