A capacitive micromachined ultrasonic transducer (CMUT) was engineered and functionalized with either zeolitic imidazolate framework-8 (ZIF-8) dispersed in an AZ1512HS photoresist matrix or with graphene oxide (GOx) to operate as a gravimetric sensor for organic vapors. The sensor response was investigated under controlled humidity conditions during pulsed exposure to acetone, ethyl methyl ketone, isopropanol, kerosene, and diesel vapors. The impedance of the device was monitored by observing and tracking the resonance frequency shift as well as the resistance maximum shift, giving us the possibility to track two response parameters simultaneously. Different combinations of shifts in the sensor resonance frequency and the resistance maximum values were observed for the ZIF-8 functionalized device when exposed to the selected vapors, ranging from 12.4 kHz for ethyl methyl ketone to 2.4 kHz for diesel, and from 580 Ω for acetone to 20 Ω for isopropanol. Sensors functionalized with GOx did not demonstrate any significant response to either ethyl methyl ketone or isopropanol in the frequency domain. GOx-functionalized sensors were used for relative humidity monitoring in test gases. Besides the conventional response of the produced gravimetric sensing system, we also observed a strong relationship between the humidity of the gas mixture and the strength of the interaction of target gases with the functional film of the sensor. The results highlight the multidimensional nature of the sensor response and demonstrate how humidity influences the interaction between vapor molecules and the functional coating. This paper focuses on the characterization of the coupled behavior of resonance frequency and resistance shifts under controlled operating conditions. The presented experimental setup provides a basis for future concentration-dependent investigations and functional material comparisons in CMUT-based gravimetric sensing systems and provides a necessary foundation for accurate interpretation of future concentration-resolved measurements.
In sensing technologies, a hydrogel sensor with a specific response to stimuli allows for real-time monitoring of mechanical, thermal, and biochemical signals in wearable and implantable devices. This review discusses the latest advances in hydrogel-based sensors published between 2023 and spring 2026 and the design strategies prevalent in these articles, including the use of polymers, nanomaterial reinforcement, incorporation of ionic solvents, and physical or chemical crosslinking. The influence of supramolecular hydrogels on the quality of sensor parameters, including the impact on mechanical resistance, ionic conductivity, adaptation, and self-healing, is examined. In biomedical engineering, hydrogels, thanks to their biomimetic and programmable properties, enable control of wound repair and soft tissue interfaces. The review concludes by outlining the challenges, opportunities, and advances in the chemistry and mechanics of hydrogels, which may ultimately facilitate the development of multifunctional monitoring systems in healthcare. The abundance of information requires systematic, frequent reviews to accelerate the application of innovative solutions in practice. Carbon nanostructures are a key component that ensures the sensor’s electrical conductivity. 3D printing technology has enabled the creation of individually customizable health monitoring devices. The work also highlights the use of nanodots in sensor production.
Recent developments and general penetration of society by relations between robots and human beings generate multiple feelings, opinions, and reactions. Such a situation develops a request to analyze this area; multiple references to facts indicate that the situation differs from public opinion. This paper provides a detailed analysis performed on the wide area of human–robot interaction (HRI). It delivers an original classification of HRI with respect to human emotion, technical means, human reaction prediction, and the general cooperation-collaboration field. Analysis was executed using reference outcome sorting and reasoning into separate groups, provided in separate tables. Finally, the analysis is finished by developing a big picture of the situation with strong points and general tendencies outlined. The paper concludes that HRI still lacks methodology and training techniques for the initial stage of human–robot cooperation. Also, in the paper, instrumentation for HRI is analyzed, and it is inferred that the main bottlenecks remain in the process of being understood, lacking an intuitive interface and HRI rules formulation, which are suggested for future work.
Custom electronics tailored for ultrasonic applications with four ultrasonic transmit-receive channels and a nominal 25 MHz single channel frequency were developed for ultrasound BAW and SAW biosensor uses. The designed integrated microcontroller, supported by Python with a SciPy library, and the developed system measured the time of flight (TOF) and other wave properties to characterize the acoustic properties of a bulk of the liquid in a microchannel or acoustic properties of biological species attached to an analytic surface in real time. The system can utilize both piezoelectric and capacitive micromachined ultrasound transducers. The device demonstrated a linear response to changes in water salinity. This response was primarily attributed to the time-of-flight (TOF) changes related to the varying solution density. Furthermore, real-time DNA oligonucleotide-based interactions between oligonucleotides immobilized on the device’s analytical area and oligonucleotides attached to gold nanoparticles (Au NPs) in the solution were demonstrated. The biological interaction led to an exponential decrease in the acoustic interfacial wave propagating across the interface between the solution and the solid surface of the sensor, the TOF signal. This decrease was attributed to the increase in the effective density of the solution in the vicinity of the sensor’s analytical area, as Au NPs modified by oligonucleotides were binding to the analytical area. The utilization of Au NPs in oligonucleotide surface binding yields a considerably stronger sensor signal than previously observed in earlier CMUT-based TOF biosensor prototypes.
In this paper, we provide a systematic review of atomic force microscopy (AFM), a fast-developing technique that embraces scanners, controllers, and cantilevers. The main objectives of this review are to analyze the available technical solutions of AFM, including the limitations and problems. The main questions the review addresses are the problems of working in contact, noncontact, and tapping AFM modes. We do not include applications of AFM but rather the design of different parts and operation modes. Since the main part of AFM is the cantilever, we focused on its operation and design. Information from scientific articles published over the last 5 years is provided. Many articles in this period disclose minor amendments in the mechanical system but suggest innovative AFM control and imaging algorithms. Some of them are based on artificial intelligence. During operation, control of cantilever dynamic characteristics can be achieved by magnetic field, electrostatic, or aerodynamic forces.
A capacitive micromachined ultrasound transducer (CMUT) was engineered and functionalized with zeolitic imidazolate framework-8 (ZIF-8) dispersed in a photoresist AZ1512HS (AZ) matrix to function as a gravimetric gas sensor. The sensor response was recorded in the presence of nitrogen, argon, carbon dioxide, and methane gases as well as water, acetylene, a propane/butane mixture, n-hexane, gasoline, and diesel vapors. The photoresist matrix alone was found to have a negligible response to all the gases and vapors, except for water vapor. No visible difference in sensor response was detected when switching from nitrogen to methane gas. However, a strong shift in the sensor resonance frequency was observed when exposed to higher hydrocarbons, ranging from 1 kHz for acetylene to 7.5 kHz for gasoline. Even longer-chain hydrocarbons, specifically kerosene and more so diesel, had a significantly reduced sensor frequency shift compared with gasoline. Sensors functionalized with a thin film of AZ+ZIF-8 demonstrated higher sensitivity in their response to a hydrocarbon molecular mass than without functionalization.
The prototype gravimetric microelectromechanical imine functionalized CO2 sensor equipped with custom electronics and significantly increased stability under sub-percent concentrations is investigated. Instabilities caused by the relative air humidity were eliminated by two in-situ calibration methods: two-channel readings correction and single-channel correction by the reference disturbance. Capacitive micromachined ultrasound transducers (CMUT) were designed for 15 MHz nominal resonance frequency, while actual sensor readings were lower (over 12 MHz) due to the functionalization. The resonance frequency of polyethyleneimine (PEI) functionalized CMUT during sub-percent CO2 detection experienced instabilities of several hundred Hz while the relative humidity of the air was changed between 10% and 35%. Readings of graphene oxide (GOx) functionalized CMUT working in parallel with PEI functionalized CMUT were used for two-channel correction, resulting in highly stable sensor output, characterized by 3.2 Hz standard deviation during almost one hour experiment, while relative humidity varied between 10% and 25%. Single channel reading correction method resulted in larger residual instability, characterized by a standard deviation of up to 36 Hz over a two-hour experiment, however, it was found to be more effective for longer humidity-induced drifts, since reference disturbance of known relative humidity of 75% maintained by saturated NaCl solution technique was used.
The combined static displacement of specifically arranged microscale electrostatic elements was analyzed to investigate a fully hermetic, perpendicular-to-plane type of electrostatic microactuator. The concept of asymmetric perimeter-supported electrostatic plates is introduced featuring softened partial clamping of plate perimeter. When engaged by an electrostatic field, asymmetrically clamped square plates tend to develop a rotating momentum, which is transferred to the background plate. Therefore, larger displacement range of the combined membrane actuator is possible by increasing of the number of elementary electrostatic cells, but not the electrostatic gap. It was shown by finite element modeling that a combination of 400 asymmetric electrostatic cells over a square background plate (the membrane actuator), roughly measured at 1 mm2, has a potential to produce a static deflection at the central point of the membrane, that is perpendicular to the plane, reaching 2 & mu;m at 45 V or up to 8 & mu;m at higher voltages. This result was supported by a physical model built at 1000:1 scale using stereolithographic three-dimensional printing. A potential application of the proposed perpendicular to plane membrane actuator is microfluidic systems.
The effect of microchannel height on acoustic streaming velocity and capacitive micromachined ultrasound transducer (CMUT) cell damping was investigated. Microchannels with heights ranging from 0.15 to 1.75 mm were used in experiments, and computational microchannel models with heights varying from 10 to 1800 micrometers were simulated. Both simulated and measured data show local minima and maxima of acoustic streaming efficiency associated with the wavelength of the `bulk acoustic wave excited at 5 MHz frequency. Local minima occur at microchannel heights that are multiples of half the wavelength (150 μm), which are caused by destructive interference between excited and reflected acoustic waves. Therefore, microchannel heights that are not multiples of 150 μm are more favorable for higher acoustic streaming effectiveness since destructive interference decreases the acoustic streaming effectiveness by more than 4 times. On average, the experimental data show slightly higher velocities for smaller microchannels than the simulated data, but the overall observation of higher streaming velocities in larger microchannels is not altered. In additional simulation, at small microchannel heights (10–350 μm), local minima at microchannel heights that are multiples of 150 μm were observed, indicating the interference between excited and reflected waves and causing acoustic damping of comparatively compliant CMUT membranes. Increasing the microchannel height to over 100 μm tends to eliminate the acoustic damping effect as the local minima of the CMUT membrane swing amplitude approach the maximum value of 42 nm, which is the calculated amplitude of the freely swinging membrane under the described conditions. At optimum conditions, an acoustic streaming velocity of over 2 mm/s in a 1.8 mm-high microchannel was achieved.
The implementation of electrostatic microactuators is one of the most popular technical solutions in the field of micropositioning due to their versatility and variety of possible operation modes and methods. Nevertheless, such uncertainty in existing possibilities creates the problem of choosing suitable methods. This paper provides an effort to classify electrostatic actuators and create a system in the variety of existing devices. Here is overviewed and classified a wide spectrum of electrostatic actuators developed in the last 5 years, including modeling of different designs, and their application in various devices. The paper provides examples of possible implementations, conclusions, and an extensive list of references.
The trade-off between the functionalization shift of the informative parameters and sensitivity of capacitive micromachined ultrasound transducers (CMUT)-based CO2 sensors is addressed, and the CMUT surface modification process by thin inkjet-printed polyethyleneimine (PEI) films is optimized. It was shown that by the proper preparation of the active CMUT surface and properly diluted PEI solution, it is possible to minimize the functionalization shift of the resonance frequency and the quality of the resonance and preserve the sensitivity potential. So, after optimization, we demonstrated 23.2 kHz frequency shift readings of the sensor with 16 MHz nominal frequency while in the gas chamber and switching between pure N2 and CO2. After testing the sensors with different PEI film thickness, it was confirmed that a 200 nm average thickness of a PEI film is an optimum, because this is the practical limit of CO2 absorption depth at given conditions. Additionally, we note that modification of the hydrophilic/hydrophobic properties of the CMUT surface allows changing the nanoscale surface roughness of the printed PEI film and controlling the area resolution of the inkjet functionalization by reducing the diameter of a single dot down to 150 μm by a commercially available printer cartridge.
Positioning accuracy in robotics is a key issue for the manufacturing process. One of the possible ways to achieve high accuracy is the implementation of machine learning (ML), which allows robots to learn from their own practical experience and find the best way to perform the prescribed operation. Usually, accuracy improvement methods cover the generation of a positioning error map for the whole robot workspace, providing corresponding correction models. However, most practical cases require extremely high positioning accuracy only at a few essential points on the trajectory. This paper provides a methodology for the online deep Q-learning-based approach intended to increase positioning accuracy at key points by analyzing experimentally predetermined robot properties and their impact on overall accuracy. Using the KUKA-YouBot robot as a test system, we perform accuracy measurement experiments in the following three axes: (i) after a long operational break, (ii) using different loads, and (iii) at different speeds. To use this data for ML, the relationships between the robot’s operating time from switching on, load, and positioning accuracy are defined. In addition, the gripper vibrations are evaluated when the robot arm moves at various speeds in vertical and horizontal planes. It is found that the robot’s degrees of freedom (DOFs) clearances are significantly influenced by operational heat, which affects its static and dynamic accuracy. Implementation of the proposed ML-based compensation method resulted in a positioning error decrease at the trajectory key points by more than 30%.
Recent industrial robotics covers a broad part of the manufacturing spectrum and other human everyday life applications; the performance of these devices has become increasingly important. Positioning accuracy and repeatability, as well as operating speed, are essential in any industrial robotics application. Robot positioning errors are complex due to the extensive combination of their sources and cannot be compensated for using conventional methods. Some robot positioning errors can be compensated for only using machine learning (ML) procedures. Reinforced machine learning increases the robot's positioning accuracy and expands its implementation capabilities. The provided methodology presents an easy and focused approach for industrial in situ robot position adjustment in real-time during production setup or readjustment cases. The scientific value of this approach is a methodology using an ML procedure without huge external datasets for the procedure and extensive computing facilities. This paper presents a deep q-learning algorithm applied to improve the positioning accuracy of an articulated KUKA youBot robot during operation. A significant improvement of the positioning accuracy was achieved approximately after 260 iterations in the online mode and initial simulation of the ML procedure.
Vibration energy harvesting is receiving significant interest due to the possibility of using extra power in various machines and constructions. This paper presents an energy-harvesting system that has a structure similar to that of a linear generator but uses permanent magnets and magnetorheological fluid insets. The application of a standard vehicle example with low frequencies and amplitudes of the excitations was used for the optimization and experimental runs. The optimization for low excitation amplitudes shows that the best magnetic field change along the slider is obtained using differentially orientated radial magnets of 5 mm in width. This configuration was used for the experimental research, resulting in 1.2–3.28 W of power generated in the coils. The power conditioning system in the experimental research was replaced by loading resistors. Nevertheless, the initial idea of energy harvesting and a damping effect was confirmed by the circuit voltage output.
Proposed fully hermetic actuator design is intended for microfluidic valve application in biosensors. Asymmetric CMUT cells were designed as square perimeter-clamped plates with softened clamping on three sides. While engaged by electrostatic field, these cells tend to develop the rotating momentum, which is transferred to the background plate. It was shown that combination of 400 asymmetric CMUT cells over a square background plate (the membrane actuator), roughly measured at 1 mm 2 , has a potential to produce the perpendicular to plane static deflection of the membrane’s central point reaching 2 µm at 45 V or up to 8 µm at higher voltages, without increase of the electrostatic gap of CMUT cells.
Ever-growing field of structural health monitoring (SHM) applications requires automatization of the structure monitoring process. Automatization of SHM processes is mainly limited by the lack of suitable sensors, such situation is especially noticeable in industrial solid-fuel boilers applications. There is huge lack of cheap and reliable sensors for internal concrete stress measurements in high-...
Concept of symmetry covers physical link between road profile form, vehicle dynamic characteristics, and speed conjunction. Symmetry frame between these items is asymmetric itself and has no direct expression, but it affects a vibration level on the vehicle and driving comfort. Usually, we can change only the vehicle’s speed to achieve desired vibrations level of the driver and passengers. Recently, vehicle dynamic characteristics can be changed depending on its damping system structure, but these solutions are limited by construction and control possibilities and evidently represented by symmetric dependency between road input and the resulting acceleration of the vehicle. The main limitation of this process is to have a reliable value of the existing road profile that is mainly defined by road category but unpredictable for each road distance. Functional road profile calculations are provided in this article, where power spectral density (further-PSD) and waviness of the road play the main role in delineating road profile parameters. Furthermore, the transfer function system was created using full car dynamic model analysis. Values on vehicle suspension’s effects on acceleration were obtained from vehicle speed and road roughness. Acceleration values and transfer function were used to calculate PSD value quickly and practically. This calculated result can be formed as a control value to the vehicle damping control. In addition, the provided methodology became useful to determine road quality for adjustment of vehicle suspension parameters and set safe driving characteristics, which became part of driver assistant systems or autonomous driving mode.
This review paper discusses the advances of the gravimetric detection devices based on capacitive micromachined ultrasound transducers structure. Principles of gravimetric operation and device modeling are reviewed through the presentation of an analytical, one-dimensional model and finite element modeling. Additionally, the most common fabrication techniques, including sacrificial release and wafer bonding, are discussed for advantages for gravimetric sensing. As functional materials are the most important part of the selective gravimetric sensing, the review of different functional material properties and coating and application methods is necessary. Particularly, absorption and desorption mechanisms of functional materials, like methylated polyethyleneimine, with examples of applications for gas sensing and using immune complexes for specific biomolecules detection are reviewed.
A gravimetric gas detection device based on surface functionalized Capacitive Micromachined Ultrasound Transducers (CMUTs) was designed, fabricated and tested for detection of carbon dioxide (CO2) and sulfur dioxide (SO2) mixtures in nitrogen. The created measurement setup of continuous data collection, integrated with an in-situ Fourier Transform Infrared (FT-IR) spectroscopy, allows for better understanding of the mechanisms and molecular interactions with the sensing layer (methylated poly(ethylene)imine) and its need of surface functionalization for multiple gas detection. During experimentation with CO2 gases, weak molecular interactions were observed in spectroscopy data. Linear sensor response to frequency shift was observed with CO2 concentrations ranging from 0.16 vol % to 1 vol %. Moreover, the Raman and FT-IR spectroscopy data showed much stronger SO2 and the polymer interactions, molecules were bound by stronger forces and irreversibly changed the polymer film properties. However, the sensor change in resonance frequency in the tested region of 1 vol % to 5 vol % SO2 showed a linear response. This effect changed not only the device resonance frequency but also affected the magnitude of electroacoustic impedance which was used for differentiating the gas mixture of CO2, SO2, in dry N2.