PROBLEM TO BE SOLVED: To give a repeatability to the temperature of floating kit parts between treatment of wafers. SOLUTION: In a plasma treatment chamber, warm-up plasma is formed in the interior of the chamber to heat floating kit parts in the time when a prescribed plasma treatment procedure (recipe) is not executed in the chamber. The temperature of the floating kit parts are maintained in the range of the respective schedule target temperatures of the floating kit parts during the time when a scheduled plasma treatment is not performed using warm-up plasma other than that in this recipe.
Kenneth S Collins合作论文数Appl Mat Inc19
Jeffrey R. Marks合作论文数Department of Surgery, School of Medicine, Duke University17
peter r keswick合作论文数14chanlon yang合作论文数13jerry yuenkui wong合作论文数11Michael Rice合作论文数9john r trow合作论文数8craig a roderick合作论文数7lawrence changlai lei合作论文数6masato m toshima合作论文数6Tetsuya Ishikawa合作论文数RIKEN Harima Institute6gerald zheyao yin合作论文数5d pinson ii jay合作论文数5Raymond Hung合作论文数4nicolas j bright合作论文数3james p cruse合作论文数3douglas a buchberger合作论文数3chunshi cui合作论文数2eric askarinam合作论文数2jian ding合作论文数2li wu合作论文数2
Bradley Taylor合作论文数Clinical and Translational Science Institute of Southeastern Wisconsin, Medical College of Wisconsin2joshua chiuwing tsui合作论文数1gerald yin合作论文数1jon mohn合作论文数1joshua tsui合作论文数1jay d pinson合作论文数1yuenkui wong合作论文数1Robert Lum合作论文数1
