The focused helium ion beam-solid state material interaction volumes differ in thin membranes and in bulk substrates [1, 2]. While nanometer-scale structures with feature sizes of 5 nm or smaller have been machined in thin membranes [3-5], inconsistent results have been observed in bulk substrates where the irradiated region often swells rather than mills [6]. The depth and breadth of the interaction volume scales with beam energy, and the sputter yield also varies significantly. In this study, we seek to explore and understand these differences by observing the progression of focused helium ion beam milling. For this we used transmission electron microscope images of the beam-irradiated cross sections of 100-nm-thick gold membrane and 400-nm-thick (essentially bulk) gold substrates. We varied the ion beam landing energies and the dose as well.

Journal Article In situ FIB-SEM Experimentation: from Nanoscale Wetting to Nanofabrication of Gallium-based Liquid Metals Get access K Doudrick, K Doudrick School for Engineering of Transport, Matter and Energy, Arizona State University, Tempe, AZ 85287School of Sustainable Engineering and The Built Environment, Arizona State University Tempe, AZ 85287 Search for other works by this author on: Oxford Academic Google Scholar S Liu, S Liu School for Engineering of Transport, Matter and Energy, Arizona State University, Tempe, AZ 85287 Search for other works by this author on: Oxford Academic Google Scholar EM Mutunga, EM Mutunga University of the District of Columbia, Washington, DC Search for other works by this author on: Oxford Academic Google Scholar KL Klein, KL Klein University of the District of Columbia, Washington, DCMaterial Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899 Search for other works by this author on: Oxford Academic Google Scholar KK Varanasi, KK Varanasi Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139 Search for other works by this author on: Oxford Academic Google Scholar K Rykaczewski K Rykaczewski School for Engineering of Transport, Matter and Energy, Arizona State University, Tempe, AZ 85287 Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 20, Issue S3, 1 August 2014, Pages 320–321, https://doi.org/10.1017/S1431927614003328 Published: 27 August 2014

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Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.