This paper introduces a `high-frequency' resonant tri-axial tuning fork gyroscope (TFG) with a single-drive mode of operation. The quad-mass device is implemented on a 2×2 mm 2 vacuum-packaged die fabricated using the epi-seal process, making this one of the smallest wafer-level packaged 3-axis gyros. In contrast to conventional resonant TFGs, the resonant frequencies are designed to be relatively high (~138 kHz) permitting high bandwidth for mode-matched operation and enhancing resistance to shock and vibration. The results show sensitivity to all three axes with mode-matched operation for the Z-axis and mode-split for the X- and Y-axes.

Research on MEMS Resonators began over 50 years ago. In just the last 10 years, there has been a series of important technological developments, and (finally!) success at commercialization. The presentation will highlight some key milestones along this path, describe some of the critical technology steps, and outline some of the important non-technological events within SiTime - all of these factors contributed to the successful outcome.

We present a technique for direct estimation of the conservative and dissipative nonlinearities of symmetric MEMS resonators. The technique is based on measuring the ring-down response, during which the nonlinearities result in an amplitude-dependent frequency and non-exponential decay. Here we show how analysis of the amplitude and phase of the ring-down response allows one to estimate conservative and dissipative nonlinearities, in addition to the linear natural frequency and quality factor, associated with a vibrational mode. The coefficients obtained from the test allow one to predict the nonlinear open and closed loop responses of the resonator.

This paper investigates the impact of operating a vibratory rate gyro (VRG) at large oscillation amplitude where the VRG's driven axis behaves like a nonlinear oscillator, described by the Duffing equation. Although open-loop resonators operating above a critical amplitude exhibit catastrophic jump instabilities, we demonstrate that through closed-loop operation, the drive axis can be stably operated at an amplitude above this threshold without impacting drive-axis stability or bias instability, resulting in decreased Angle Random Walk (ARW).

This work introduces a modified anchor loss model that is experimentally validated over an unprecedented range of low frequency (200 kHz -13 MHz) devices.All measured designs, covering nearly two orders of magnitude in frequency, fell within 12% of the model's prediction.This experimentally validated model provides a framework for designers to modify designs (e.g., stem length, anchor area) in order to reduce anchor loss for arbitrary 3D geometries and identifies key process parameters (e.g., stress) for control of anchor losses.