It is shown here that the observation of the phenomenon of like small angle scattering of X-rays in very thin heterogeneous films, can be made comparatively easily by using grazing angle reflectometry of X-rays. The feasibility was achieved with co-sputtered thin films of approximately 600 Å thickness, made up by crystalline platinum clusters embedded in an amorphous alumina matrix. The experimental reflectivity profiles are simulated by the intensity superposition of two components: (i) the specular part caused by the usual interference phenomenon between the partial waves reflected from the air-film and film-substrate interfaces, and (ii) the like-small angle scattering part due to diffraction by platinum clusters. It is found that the shape of such clusters is spherical characterized by mean values of diameter \(\) and inter-cluster distance \(\) of the order 29 Å and 45 Å respectively with standard deviations \(\) and \(\) of the order of 3 Å. Such an observation of both the interference and diffraction phenomena indicates that the thin granular film exhibits both its continuous and heterogeneous aspects together.

The physical properties of nanocermets are related mostly to their morphology. In this contribution, we present the microstructural and morphological evolution of co-sputtered PtAl2O3 granular films with thickness, metal concentration and thermal annealing. These investigations are achieved by grazing angle X-ray reflectometry, transmission electron microscopy and atomic force microscopy. The experimental results show that (i) the diameter of platinum clusters increases as a function of film thickness, annealing temperature and metal concentration and (ii) a columnar growth is observed whose morphology also depends on the previous parameters and on the growth direction.

The physical properties of nanocermets are related mostly to their morphology. In this contribution, we present the microstructural and morphological evolution of co-sputtered Pt–A12O3 granular films with thickness, metal concentration and thermal annealing. These investigations are achieved by grazing angle X-ray reflectometry (GAXR), small angle X-ray scattering (SAXS), transmission electron microscopy and atomic force microscopy. The experimental results show that: (1) the diameter of platinum nanoparticles increases as a function of film thickness, annealing temperature and metal concentration; and (2) a columnar growth is observed whose morphology is depending also on the previous parameters and on the growth direction.