Among thin-film technologies Cu(In,Ga)Se/sub 2/ (CIGS) based PV-modules have the highest potential of efficiency. ZSW developed a line for 30 cm/spl times/30 cm modules with high reproducibility and quality, which is the basis for process development and cross checks with new processes and equipment. ZSW further developed the deposition technology of CIGS up to 120 cm/spl times/60 cm substrate size. Failure mechanisms and film quality have been analyzed. These technologies are being transferred to Wurth Solar CIGS pilot line for substrates up to 120 cm/spl times/60 cm. First results of film deposition and large area modules are presented.