In the development of any type of magnetic field sensor based on magnetic films, special consideration must be given to the magnetic layer component. The presented work investigates the use of scalable flux closing magnetostrictive multilayers for inverse magnetoelectric sensors. In such a type of magnetic field sensor, highly sensitive AC and DC field detection relies on strong excitation of the incorporated magnetic layers by piezoelectrically driven cantilever oscillation at mechanical resonances. The provoked periodic flux change is influenced by the magnetic field to be measured and is picked up by a coil, which generates the measured output. The multilayered inverse magnetoelectric sensor is investigated with regard to linearity, noise behavior, and detection limit of DC and AC signals. A significant advancement for inverse magnetoelectric thin film sensors is demonstrated in this study. Using exchange bias stabilized magnetic multilayers with flux closure structures, detection limits are improved by an order of magnitude to less than 8 pT/Hz1/2 at 10 Hz and 18 pT/Hz1/2 at DC.

In principle, electrode-based bioelectrical signal acquisition can be complemented by biomagnetic sensing and therefore requires a more detailed assessment, especially because of the availability of novel noncryogenic sensor technologies. The current development of thin-film magnetoelectric (ME) sensors ensures that ME technology is becoming a prospective candidate for biomagnetometry. The main obstacle for large-scale usage is the lack of extremely low noise floors at the final sensor system output. This article highlights the current state of ME sensor development based on a magnetocardiography (MCG) pilot study involving a healthy volunteer in a magnetically shielded chamber. For assessment, an ME prototype (converse ME thin-film sensors) will be applied for the first time. This sensor type ensures a noise amplitude spectral density below 20 pT / $\sqrt {\text {Hz}}$ at 10 Hz by using a sophisticated magnetic layer system. The main aim of this pilot study is to evaluate the applicability of this promising sensor for the detection of a human heart signal and to evaluate the sensor output with competitive optical magnetometry technology. A magnetic equivalent of a human R wave could be successfully detected within a 1-min measurement period with the sensor presented here. Finally, the article will provide an outlook on future ME perspectives and challenges, especially for cardiovascular applications.

Dedicated research is currently being conducted on novel thin film magnetoelectric (ME) sensor concepts for medical applications. These concepts enable a contactless magnetic signal acquisition in the presence of large interference fields such as the magnetic field of the Earth and are operational at room temperature. As more and more different ME sensor concepts are accessible to medical applications, the need for comparative quality metrics significantly arises. For a medical application, both the specification of the sensor itself and the specification of the readout scheme must be considered. Therefore, from a medical user’s perspective, a system consideration is better suited to specific quantitative measures that consider the sensor readout scheme as well. The corresponding sensor system evaluation should be performed in reproducible measurement conditions (e.g., magnetically, electrically and acoustically shielded environment). Within this contribution, an ME sensor system evaluation scheme will be described and discussed. The quantitative measures will be determined exemplarily for two ME sensors: a resonant ME sensor and an electrically modulated ME sensor. In addition, an application-related signal evaluation scheme will be introduced and exemplified for cardiovascular application. The utilized prototype signal is based on a magnetocardiogram (MCG), which was recorded with a superconducting quantum-interference device. As a potential figure of merit for a quantitative signal assessment, an application specific capacity (ASC) is introduced. In conclusion, this contribution highlights metrics for the quantitative characterization of ME sensor systems and their resulting output signals in biomagnetism. Finally, different ASC values and signal-to-noise ratios (SNRs) could be clearly presented for the resonant ME sensor (SNR: −90 dB, ASC: 9.8×10−7 dB Hz) and also the electrically modulated ME sensor (SNR: −11 dB, ASC: 23 dB Hz), showing that the electrically modulated ME sensor is better suited for a possible MCG application under ideal conditions. The presented approach is transferable to other magnetic sensors and applications.

Abstract Some magnetoelectric sensors require predefined external magnetic fields to satisfy optimal operation depending on their resonance frequency. While coils commonly generate this external magnetic field, a microelectromechanical systems (MEMS) resonator integrated with permanent magnets could be a possible replacement. In this proof-of-concept study, the interaction of a MEMS resonator and the ME sensor is investigated and compared with the standard approach to achieve the best possible sensor operation in terms of sensitivity. The achievable sensor sensitivity was evaluated experimentally by generating the magnetic excitation signal by a coil or a small-sized MEMS resonator. Moreover, the possibility of using both approaches simultaneously was also analysed. The MEMS resonator operated with 20Vppat 1.377 kHz has achieved a sensor sensitivity of 221.21mV/T. This sensitivity is comparable with the standard approach, where only a coil for sensor excitation is used. The enhanced sensitivity of 277.0mV/T could be identified by generating the excitation signal simultaneously by a coil and the MEMS resonator in parallel. In conclusion, these MEMS resonator methods can potentially increase the sensitivity of the ME sensor even further. The unequal excitation frequency of the MEMS resonator and the resonance frequency of the ME sensor currently limit the performance. Furthermore, the MEMS resonator as a coil replacement also enables the complete sensor system to be scaled down. Therefore, optimizations to match both frequencies even better are under investigation.

The possibility of tuning the magnetic properties of materials with voltage (converse magnetoelectricity) or generating electric voltage with magnetic fields (direct magnetoelectricity) has opened new avenues in a large variety of technological fields, ranging from information technologies to healthcare devices and including a great number of multifunctional integrated systems, such as mechanical antennas, magnetometers, and radio frequency (RF) tunable inductors, which have been realized due to the strong strain-mediated magnetoelectric (ME) coupling found in ME composites. The development of single-phase multiferroic materials (which exhibit simultaneous ferroelectric and ferromagnetic or antiferromagnetic orders), multiferroic heterostructures, as well as progress in other ME mechanisms, such as electrostatic surface charging or magneto-ionics (voltage-driven ion migration), have a large potential to boost energy efficiency in spintronics and magnetic actuators. This article focuses on existing ME materials and devices and reviews the state of the art in their performance. The most recent progress on different ME devices based on ME heterostructures is presented but with a larger emphasis on ME antennas and sensors due to the significant advances achieved in these applications. The rapid development of mechanically actuated ME antennas has been observed over the past several years, producing ME antennas that are miniaturized by 1-2 orders compared to conventional antenna size. Magnetic sensors based on simple ME composites are potentially promising alternatives to conventional magnetometers due to their very good detectivity (<pT/Hz(1/2)) at low frequencies. Other ME devices reviewed in this article include RF tunable inductors with high inductance tunability and quality (Q) factor; non-reciprocal microelectromechanical system (MEMS) bandpass filters with dual H- and E-field tunability; passive isolators and gyrators in the low-frequency (LF) range; and ME random access memories for low-power data storage. All these compact and lightweight ME devices are also promising for future biomedical and wireless applications. Finally, some open questions and future directions where the community might be headed are provided.

The magnetostrictive effect is an important topic for scientific research as well as for technological applications. Since magnetostriction constitutes an important property of emerging smart materials, experimental investigations as well as theoretical discussions of the magnetostrictive effect are of great educational value. Quantitative measurements of the magnetostrictive effect are usually technically sophisticated or not related to real applications or everyday materials. The objective of this article is to describe a simple and low-cost experiment for the qualitative and quantitative investigation of magnetostrictive characteristics employing magnetostrictive laser deflection and optical amplification. Measurements are performed for precut magnetostrictive materials found in electronic article surveillance tags. Comparative theoretical calculations for magnetostrictive cantilever beams prove the quality of the experimental approach. The described method for magnetostriction measurements has been developed as a part of the Scientific Outreach Project within the Collaborative Research Centre (CRC) 1261 "Magnetoelectric Sensors."

Biomagnetic field sensors based on AlN/FeCoSiB magnetoelectric (ME) composites desire a resonant frequency that can be precisely tuned to match the biomagnetic signal of interest. A tunable mechanical resonant frequency is achieved when ME composites are integrated onto shape memory alloy (SMA) thin films. Here, high-quality c -axis growth of AlN is obtained on (111) Pt seed layers on both amorphous and crystallized TiNiCu SMA thin films on Si substrates. These composites show large piezoelectric coefficients as high as d 33,f = 6.4 pm/V ± 0.2 pm/V. Annealing the AlN/Pt/Ta/amorphous TiNiCu/Si composites to 700 °C to crystallize TiNiCu promoted interdiffusion of Ti into the Ta/Pt layers, leading to an enhanced conductivity in AlN. Depositing AlN onto already crystalline TiNiCu films with low surface roughness resulted in the best piezoelectric films and hence is found to be a more desirable processing route for ME composite applications.

The strong strain-mediated magnetoelectric (ME) coupling found in thin-film ME heterostructures has attracted an ever-increasing interest and enables realization of a great number of integrated multiferroic devices, such as magnetometers, mechanical antennas, RF tunable inductors and filters. This paper first reviews the thin-film characterization techniques for both piezoelectric and magnetostrictive thin films, which are crucial in determining the strength of the ME coupling. After that, the most recent progress on various integrated multiferroic devices based on thin-film ME heterostructures are presented. In particular, rapid development of thin-film ME magnetometers has been seen over the past few years. These ultra-sensitive magnetometers exhibit extremely low limit of detection (sub-pT/Hz1/2) for low-frequency AC magnetic fields, making them potential candidates for applications of medical diagnostics. Other devices reviewed in this paper include acoustically actuated nanomechanical ME antennas with miniaturized size by 1–2 orders compared to the conventional antenna; integrated RF tunable inductors with a wide operation frequency range; integrated RF tunable bandpass filter with dual H- and E-field tunability. All these integrated multiferroic devices are compact, lightweight, power-efficient, and potentially integrable with current complementary metal oxide semiconductor (CMOS) technology, showing great promise for applications in future biomedical, wireless communication, and reconfigurable electronic systems.

Magnetoelectric (ME) thin film composites consisting of sputtered piezoelectric (PE) and magnetostrictive (MS) layers enable for measurements of magnetic fields passively, i.e. an AC magnetic field directly generates an ME voltage by mechanical coupling of the MS deformation to the PE phase. In order to achieve high field sensitivities a magnetic bias field is necessary to operate at the maximum piezomagnetic coefficient of the MS phase, harnessing mechanical resonances further enhances this direct ME effect size. Despite being able to detect very small AC field amplitudes, exploiting mechanical resonances directly, implies a limitation to available signal bandwidth along with the inherent inability to detect DC or very low frequency magnetic fields. The presented work demonstrates converse ME modulation of thin film Si cantilever composites of mesoscopic dimensions (25 mm × 2.45 mm × 0.35 mm), employing piezoelectric AlN and magnetostrictive FeCoSiB films of 2 µm thickness each. A high frequency mechanical resonance at about 515 kHz leads to strong induced voltages in a surrounding pickup coil with matched self-resonance, leading to field sensitivities up to 64 kV/T. A DC limit of detection of 210 pT/Hz1/2 as well as about 70 pT/Hz1/2 at 10 Hz, without the need for a magnetic bias field, pave the way towards biomagnetic applications.

Energy harvesters offer an attractive power source alternative in particular for the next generation of mobile sensor applications. The current work investigates the power output of bulk micromachined 3 mm $\times2$ mm $\times50\,\,\mu \text{m}$ sized cantilever-type piezoelectric (2 $\mu \text{m}$ AlScN) energy harvesting device that is magnetically driven by miniaturized NdFeB permanent magnets attached to the free-end of the cantilevers. A novel energy harvester and one potential application is introduced. Properties and relevant figures-of-merit for AlScN in comparison to AlN are discussed on device level. Magnetic properties of the permanent magnet are summarized. The influences of the electrode area coverage, applied external magnetic field as well as fatigue properties of the harvesters are investigated. FEA results of the harvester’s magnetic interactions are presented. Finally the suitability of a coil in comparison to a piezoelectric energy harvester is evaluated. A maximum peak power of 15.6 $\mu \text{W}$ is obtained from a 2 mm wide cantilever with 2 mm long top electrode when driven under an homogeneous external field of magnitude $\text{B}_{\mathrm {AC}} = 1$ G at resonance $f_{\mathrm {res}} = 3240$ Hz. The maximum power density is calculated as 15.8 mW/cm3 (2.6 W/m2) when applying the optimal load impedance approximately 117 $\text{k}\Omega $ . [2019-0059]

Measurements of the converse magnetoelectric effect, observed for mesoscopic cantilever type magnetoelectric composites, are presented. The silicon based samples employ 2 mu m of amorphous (Fe90CO10)(78)Si12B10 film as soft magnetic, magnetostrictive phase. The piezoelectric phase consists of 2 mu m sputter deposited, highly textured aluminum nitride (MN) in a plate capacitor arrangement. Exciting the piezoelectric phase at various frequencies leads to sharp peaks of induced voltage in a surrounding, mechanically decoupled pickup coil, corresponding to several mechanical resonances of the beam. The peak amplitude modulation can be exploited to detect DC magnetic fields. This entirely passive readout strategy is advantageous over other methods of sensitivity enhancement, typically requiring an active source of magnetic fields, thus prohibiting the construction of sensor arrays. Field dependent mechanical quality factors of up to 3800 near magnetic saturation are featured by a strong field dependence of induced voltage, reaching to 2290 V T-1 in the 20 mu T field regime. Vibrational measurements reveal a combination of the 15th flexural with a high order torsional mode as primarily active, at a resonance frequency of 520.7 kHz. This finding is supported by simple analytical estimations and literature. In unbiased operation, a linear resolution of 1.2 nT towards small 200 mHz fields is shown.

Bistable characteristics of a nonlinear multiferroic composite resonator containing ferromagnetic and piezoelectric layers are investigated. The resonator was a borosilicate glass substrate of 25 mm × 2 mm dimensions and 150 μm thickness with a 2 μm thick amorphous ferromagnetic FeCoSiB layer and a 2 μm thick piezoelectric AlN layer deposited on its sides by magnetron sputtering. The resonator was excited by ac voltage at a frequency of 156 kHz, matching its longitudinal acoustic resonance frequency. The bistability loops were observed with increasing and decreasing frequency at constant excitation voltage and with increasing and decreasing voltage at constant frequency. With increasing excitation voltage, the resonator frequency first decreases by ∼0.7 kHz and then increases again to the initial value. A bistability model is suggested that uses Lorentzian shape resonance line and measured dependences of the resonance frequency and transmission coefficient on the output signal, which quantitatively describes experimental data. It is shown that bistability in a multiferroic resonator arises due to the nonlinearity of the ferromagnetic layer.

Thin-film magnetoelectric sensors, i.e., composites of magnetostrictive and piezoelectric materials, are able to measure very low magnetic flux densities in the picotesla range. In order to further improve the limit of detection it is of high importance to understand and quantify the relevant noise sources. In this paper, a common model for the deflection noise in vibrational structures is applied to the cantilever structure of resonant magnetoelectric sensors. By means of deflection and noise measurements the existence of thermal-mechanical noise even in sensor structures with a size in the centimeter range is proven. Based on these findings a noise equivalent circuit is suggested which allows not only the distinction between the impact of different sensor-intrinsic noise sources and also the involvement of the preamplifier noise. We found that the thermal-mechanical noise is the dominant noise source if direct signal detection is performed at the first bending resonance frequency of the sensor. However, this kind of noise is not the limiting influence when applying magnetic frequency-conversion techniques.

Magnetoelectric thin film composites have demonstrated their potential to detect sub-pT magnetic fields if mechanical resonances (typically few hundred Hz to a few kHz) are utilized. At low frequencies (1–100 Hz), magnetic field-induced frequency conversion has enabled wideband measurements with resonance-enhanced sensitivities by using the nonlinear characteristics of the magnetostriction curve. Nevertheless, the modulation with a magnetic field with a frequency close to the mechanical resonance results in a number of drawbacks, which are, e.g., size and energy consumption of the sensor as well as potential crosstalk in sensor arrays. In this work, we demonstrate the feasibility of an electric frequency conversion of a magnetoelectric sensor which would overcome the drawbacks of magnetic frequency conversion. This magnetoelectric sensor consists of three functional layers: an exchange biased magnetostrictive multilayer showing a high piezomagnetic coefficient without applying a magnetic bias field, a non-linear piezoelectric actuation layer and a linear piezoelectric sensing layer. In this approach, the low frequency magnetic signal is shifted into the mechanical resonance of the sensor, while the electric modulation frequency is chosen to be either the difference or the sum of the resonance and the signal frequency. Using this electric frequency conversion, a limit of detection in the low nT/Hz1/2 range was shown for signals of low frequency.

Recent developments in the observation of magnetic domains and domain walls by wide-field optical microscopy based on the magneto-optical Kerr, Faraday, Voigt, and Gradient effect are reviewed. Emphasis is given to the existence of higher order magneto-optical effects for advanced magnetic imaging. Fundamental concepts and advances in methodology are discussed that allow for imaging of magnetic domains on various length and time scales. Time-resolved imaging of electric field induced domain wall rotation is shown. Visualization of magnetization dynamics down to picosecond temporal resolution for the imaging of spin-waves and magneto-optical multi-effect domain imaging techniques for obtaining vectorial information are demonstrated. Beyond conventional domain imaging, the use of a magneto-optical indicator technique for local temperature sensing is shown.

Tunnel magnetoresistance (TMR) junctions with CoFeB/MgO/CoFeB layers are promising for strain sensing applications due to their high TMR effect and magnetostrictive sense layer (CoFeB). TMR junctions available even in submicron dimensions can serve as strain sensors for microelectromechanical systems devices. Upon stress application, the magnetization configuration of such junctions changes due to the inverse magnetostriction effect resulting in strain-sensitive tunnel resistance. Here, strain sensitivity of round-shaped junctions with diameters of 11.3μm, 19.2μm, 30.5μm, and 41.8μm were investigated on macroscopic cantilevers using a four-point bending apparatus. This investigation mainly focuses on changes in hard-axis TMR loops caused by the stress-induced anisotropy. A macrospin model is proposed, supported by micromagnetic simulations, which describes the complete rotation of the sense layer magnetization within TMR loops of junctions, exposed to high stress. Below 0.2‰ tensile strain, a representative junction with 30.5μm diameter exhibits a very large gauge factor of 2150. For such high gauge factor a bias field H=-3.2kA/m is applied in an angle equal to 3π/2 toward the pinned magnetization of the reference layer. The strain sensitivity strongly depends on the bias field. Applying stress along π/4 against the induced magnetocrystalline anisotropy, both compressive and tensile strain can be identified by a unique sensor. More importantly, a configuration with a gauge factor of 400 at zero bias field is developed which results in a straightforward and compact measuring setup.

Recent advances in magnetoelectric sensor systems prove their growing importance for biomagnetic sensing applications. But with increasing sensitivity down to some pT in mechanical resonance the sensors require techniques to convert low frequent biomagnetic signals in the range of 0.1Hz to 40Hz into the mechanical resonance frequency of the cantilevers to utilise the effect amplification of the first bending mode. This contribution introduces the frequency conversion via electrical modulation of the piezoelectric phase and readout via the piezoelectric phase in both basic theory and experiment and compares the results to a magnetic frequency conversion method. The electrical frequency conversion shifts the wanted signal into the mechanical resonance but,with the current setup and sensors,is about a decade less sensitive compared to the magnetic approach. ×Suitable offsets in the magnetic frequency conversion effectively reduce the noise level by more than two decades.