This paper focuses on an atmospheric-pressure inductively coupled plasma (ICP) torch sustained by an argon discharge. A two-dimensional axisymmetric model is developed for the numerical simulation of the device. Maxwell equations and fluid equations were solved as the governing equations using the COMSOL Multiphysics software. The result presents the electromagnetic fields generated by the ICP, plasma parameters (electron density and temperature), and gas characteristics (gas flow and gas temperature). The study of the effects of excitation parameters (coil current, coil geometry, and coil turns) on plasma characteristics is analyzed.

A 3-D model of a microwave plasma (mwp)-enhanced chemical vapor deposition (PECVD) reactor at 2.45 GHz in argon at low pressure describing self-consistently, the coupling of the microwave energy into the plasma is presented. The characteristics of the discharge are simulated using a fluid plasma model which solves the electron and ion continuity equations, electron energy balance equation, and the Poisson's equation by finite element method, using COMSOL Multiphysics software. The physical behavior of the microwave PECVD discharge, such as plasma density, electron temperature, electric field and plasma potential, are simulated and analyzed. The chemical reactions considered in this paper are: elastic, superelastic, excitation, ionization, penning ionization and metastable quenching processes, involving electrons, ions (Ar + ), neutral atoms (Ar), and excited metastable argon atoms (Ar*). The plasma characterization results are studied for a gas temperature of 300 K, a gas pressure of 100 mtorr and a microwave power of 600 W. The effect of varying gas pressure from 50 to 200 mTorr has been studied. The obtained results turn out to be in agreement with previous measurements and show that this kind of model can lead to a better understanding of the physical processes occurring in this kind of microwave reactor and thus allow optimization of this device.

Our study is about the modeling of tridimensional plasma enhanced chemical vapor deposition (PECVD) reactors at 2.45 GHz frequency operating in Argon, to understand the distribution of its electromagnetic field in tow cases in presence of plasma and in absence and the effect of the plasma on the electromagnetic distribution, the flow of the gas/plasma system, and the plasma-to-gas heat transfer. The aim of the modeling is to describe the gas/plasma system in terms of its field, velocity and energy, by coupling two calculation modules: electromagnetic, which solves Maxwell's equations considering the permittivity of the different media, hydrodynamic, which solves the Navier-Stokes' equations for the gas/plasma system by finite element method. The effect of micro wave excitation, frequency and gas flow is considerate in our study.