We present 500times700 mum metal-coated scanning micromirrors fabricated from bonded SOI-Si wafers with ~90% reflectivity at 633 nm. Confocal images with 1 mum resolution were generated using single axis actuation of plusmn2.5deg at 1.87 KHz
hyun joon shin合作论文数1
Rebecca Richards-Kortum合作论文数Rice 360° Institute for Global Health, Rice University1
John X. J. Zhang (张晓晶)合作论文数Thayer School of Engineering, Dartmouth College1
Kazunori Hoshino合作论文数Department of Biomedical Engineering;University of Texas at Austin;Department of Biomedical Engineering, University of Texas at Austin1
