A new design for a polymeric microgripper was developed. Two microgrippers with different dimensions were considered. An evaluation between these models was performed using the simulation results. Finite-element analyses of the microgripper, using COVENTORWARE, are performed in order to evaluate the relation between the displacement, temperatures and the electrical current passing through the metallic layers.

The present paper analysis the suitability of using the polymer casting replication method for the fabrication of microfluidic components. As test structure it is used a passive micromixer with a complex geometry that contains tight angles and several curvatures. There are test three types of masters for the replication, made in silicon, SU-8 and copper.

This paper presents an optical sensor structure for microposition detection application using transparent electrodes of indium doped ZnO (IZO). The optical microsensor consists of two linear arrays of metal semiconductor - metal (MSM) silicon photodetectors with IZO transparent electrodes integrated with a polymer optical waveguide.IZO layers with a thickness of 460-580 nm have been deposited by dc magnetron sputtering technique on silicon epitaxial wafers of 30-50 Omega cm resistivity and a thickness of 23 mu m. Due to their high optical transmittance (>90%) over the 0.4-0.9 mu m spectral range, these layers contributed to an increased responsivity of the MSM photodiode structure of about 0.34 A/W, thus improving the optical position microsensor sensitivity. (C) 2009 Elsevier B.V. All rights reserved.

Processing at submicron level of the photoresists materials by direct writing method are investigated because of their applications in optoelectronics and bio-science. We have obtained surface relief gratings in single step processing on photoresists with possibility to control the modulation depth from 19 nm to 1 mum.