We developed a novel 512 x 320 tip-tilt micro mirror array (MMA) together with the entire related technology platform, including mirror fabrication process, integrated CMOS address circuitry and external drive electronics. The MMA itself consists of 2axis-tip-tilt actuators at 48 mu m pixel size, allowing a continuous pure tip-tilt motion up to 3.5 degrees in arbitrary directions, fully calibratable at standard deviations of better than 0.025 degrees. The mirrors are realized within a 2-level architecture defined by three structural layers, two for hinge and reinforcement suspension and one for the overlying mirror. They are fabricated by surface-micromachining within a fully CMOS compatible process. MMA programming is accomplished by an underlying CMOS backplane supporting drive voltages up to 27V and frame rates up to 3.6kHz.

We have developed a novel 512 x 320 micro mirror array consisting of 2axis-tip-tilt actuators with 48 mu m pixel size, allowing a continuous, pure tip-tilt motion up to 3.5 degrees in arbitrary directions, fully calibratable with standard deviations of better than 0.025 degrees. The device is realized in a fully CMOS compatible process with an underlying integrated address circuitry.

We have developed a novel 512 × 320 micro mirror array consisting of 2axis-tip-tilt actuators with 48μm pixel size, allowing a continuous, pure tip-tilt motion up to 3.5° in arbitrary directions, fully calibratable with standard deviations of better than 0.025°. The device is realized in a fully CMOS compatible process with an underlying integrated address circuitry.

A new generation of micromirror arrays (MMAs) with torsional actuators is being developed within the European research project MEMI in order to extend the usable spectral range of diffractive MMAs from deep ultraviolet into the visible and near infrared. The MMAs have 256 x 256 pixels reaching deflections above 350 nm at a frame rate of 1 kHz, which enables an operation in the target wavelength range between 240 nm and 800 nm. Customized driver electronics facilitates computer controlled operation and simple integration of the MMA into various optical setups. Tests in the visible wavelength range demonstrate the functionality and the high application potential of first MMA test samples.